本研究利用反應式磁控濺鍍將高熵合金和高熵氧化物薄膜沉積於不鏽鋼基板上進行太陽能選擇性吸收膜之應用，在本實驗中，我們將探討不同參數對於薄膜所造成的影響，像是靶材功率、氧氣和氬氣比例以及沉積時間，沉積後的薄膜將進行空氣退火熱處理分析薄膜之熱穩定性以及退火前後變化，將著重於晶體結構、組成元素比例、厚度和光學性質的探討，使用的儀器像是X光繞射儀、場發射掃描式電子顯微鏡、橢圓偏光儀、UV-Vis-NIR分光光譜儀以及放射率計等，用於薄膜的性質探討以及用於太陽能選擇性吸收膜之表現。

High entropy alloy (HEA) and high entropy oxide (HEO) coatings were deposited using RF reactive magnetron co-sputtering techniques. Stainless steel (SS) was used as substrates for solar absorber coatings. In this works, various deposition parameters including sputtering power, O2 flow rate, and deposited time were investigated. The as-deposited coatings were post annealing at different temperatures in air to investigate its thermal stability. The resulting coatings therefore exhibit various compositions, crystal structures, grain sizes, and thicknesses. The obtained coatings were examined using, field emission scanning electron microscopes (FE-SEM), transmission electron microscopes (TEM), glazing angle X-Ray diffraction (GIXRD), Energy-dispersive X-ray spectroscopy (EDS), UV/vis/NIR spectrometer, emissionmeter, and ellipsometer. Effects of the material characteristics on the coating performance are discussed.

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