本論文主要以調整非晶矽本質層的製程條件調整以達到高效率以及高可靠性的矽薄膜堆疊式太陽能電池。在矽薄膜堆疊式太陽能電池技術中，已經廣為人知的是調整適當的氫氣比例與矽甲烷混合後使用在製造非晶矽本質層中用來對抗衰減劣化的發生。但是，若只是單純的調整氫氣比例在製造五代線這樣大尺寸的矽薄膜堆疊式太陽能電池中的非晶矽本質層時，卻無法有效的減少其衰減比例，主要原因在較高的氫氣混合比時，容易造成機台在成長本質層時，電漿傷害到本質層前電洞導電層的界面。為了解決這個問題，我們在稍後的章節裡提出漸層式的本質層形成方法可有效減少其衰減率達2%。但較高的氫氣混合比在形成非晶矽本質層有較低的成長速率，研究中提供了一個系統化的方法去找出適當的氣體混合比以提升生產效率但又不犧牲太陽能電池衰減率，我們可以減少製程氣體40%的耗費，提升30%的生產效率。
在透明矽薄膜堆疊式太陽能電池的製造技術中，我們另外發現了添加固化劑在模組中的的透明矽薄膜堆疊式太陽能電池， IEC規範的測試週期達六個週期時，透明矽薄膜堆疊式太陽能模組的模組效率僅衰減了6%。

In the dissertation we approached the higher efficiency and reliable thin film tandem silicon solar cell with amorphous intrinsic layer tuning process.
For silicon thin-film solar cell, it is well known that one of the most important methods for preparing amorphous silicon doped with hydrogen (a-Si:H) with good stability against light soaking degradation is by properly tuning H2 dilution ratio in the intrinsic i-layer. However, it is hard to improve the longevity of Gen. 5 silicon thin-film tandem module by manipulating the H2 ratio within one i-layer alone because hydrogen treatment could easily compromise the front P-layer by PECVD. To solve this problem, we propose the “graded i-layer” method which incorporates multiple i-layers with different of hydrogen dilution ratios in place of the original single i-layer . By this method, the solar cell could provide higher initial power and the degradation ratio of the module could be reduced by approximately 2% comparing to the module with single i-layer. However, it has been observed that increasing hydrogen dilution has the undesirable effect of slowing down the deposition rate of the intrinsic layer, which reduce the efficiency of production. To counter this problem, we have designed a systematic approach to enhance the utilization rate of the feedstock gas, Silane. By our method, consumption of feedstock gas can be reduced by more than 40% and deposition rate of the intrinsic layer can be increased by 30% compared to the method of only increasing the hydrogen dilution without sacrificing module performance and stability.
For see through module, we found adding hardener into the conventional see-through tandem modules, that the efficiency degraded only by 6.0% for the see-through tandem modules with hardener, after 6 IEC cycles.

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