本實驗的目的是對傳統接觸式配向提出改進的方法，我們使用Kaufman-Type離子源直接斜向沉積類鑽碳膜取代先前鍍膜後轟擊的方法，並組裝成液晶盒以供量測。
　在製作配向膜的程序中，我們將CH4通入離子源，產生離子後以100eV ~ 200eV之間的參數射出，經PBN中和後以和基板面法線相差30° ~ 80°度之間的參數沉積類鑽碳膜。除了上述兩個參數外我們還使用不同的液晶來製作樣品盒。
　我們對鍍出來的類鑽碳膜作一系列的分析來探討其配向效果的來源，包含可見光譜、微拉曼散射光譜和原子力顯微鏡（AFM）等。此外我們將類鑽碳膜組裝成水平配向液晶盒量測Conoscopy與預傾角（Pre-tilt angle），之後組裝TN（Twist Nematic）液晶盒來量測V-T、對比度和反應時間。
　比較薄膜分子鍵結特性和光電量測的結果發現，雖然變化角度部分的SP2分子鍵結並沒有出現變化，但是較大角度沉積的類鑽碳膜都有相當好的光電特性，而變化能量部分雖然SP2分子鍵結有隨著能量加大而增多但光電特性沒有明顯的變化，所以形成配向效果的原因尚待探究。

　There are many problems associated with traditional rubbing technique for liquid crystal alignment. Therefore non-contact methods were proposed to solve these problems. Our previous researches showed that Diamond-like Carbon (DLC) with ion beam irradiation has abilities of aligning liquid crystal (LC). Then we replaced ion beam irradiation by direct ion beam deposit DLC films, and we found that these films also have excellent ability of aligning LC molecular.
　We fed CH4 on Kaufman-Type ion source to deposit DLC films. Then ions with energies of 100eV to 200eV were irradiated to substrate in angles of 30° to 80° from the normal of substrate. Besides we used different LC to examine the LC alignment of DLC.
　We carried out a series of measurements to reveal the characteristics of DLC films, such as spectroscopy, polar Raman scattering, atomic force microscopy, etc. Then we used DLC films to fabricate LC cells and measure the performance of these cells. Conoscopy and pre-tilt angle were measured with Parallel LC cells and V-T curve, contrast ratio, and response time were measured with twist nematic (TN) LC cells.
　From DLC characteristics and the performance of LC cells we can find that the Electro-Optical (E-O) performance is better at higher deposition angle, but the SP2 fraction measured from Raman has no obvious changes. When deposition energy increases the SP2 fraction becomes more ordered, but the E-O performance doesn’t have obvious changes. Therefore the relation between the E-O performance and the SP2 fraction is unknown. To find out the major factor which affects the performance of LC cells we need more research.

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