本研究利用物理氣相沈積，將鈣磷薄膜披覆在經過微結構處理的基材上。目的為探討單向性微米結構和鈣磷薄膜對細胞反應的影響。試片製備方面，矽晶圓藉由微影化製程並用蝕刻的方法製造出圖案。將經微圖案化處理之基材，利用物理氣相沈積的技術披覆一層鈦金屬，再披覆上鈣磷薄膜。FE-SEM觀察經微圖案化處理基材的表面形態，a-step量測披覆鈣磷薄膜之鍍層厚度，X-ray薄膜繞射儀及EDX鑑定披覆薄膜的相組成與成分。結果發現蝕刻出來的圖案分為V字形和鋸齒狀，而單一形狀之溝槽深度及寬度又各分為2 m及5 m；在薄膜方面，鈦鍍層及鈣磷薄膜皆為200 nm，鈣磷薄膜經熱處理，證實有-TCP的相存在。細胞相容性方面，將人類骨母細胞分別培養於基材上，分別為具單向性微米結構的有無、鈣磷薄膜的有無及溝槽深寬為2 m及5 m，探討其生物反應。FE-SEM觀察細胞培養30分鐘、1 hr、3 hr及12 hr的細胞形態，發現在單向性微米結構的基材上1 hr後細胞會沿著溝槽生長，細胞形態呈現狹長形；在沒有溝槽的基材細胞形態呈現圓形。利用MTT測試細胞培養於試片上5及15天的增生能力，細胞在具有微溝槽的生長情形比沒有溝槽的生長情形佳，在統計上各組之間有明顯差異(p<0.05)。ALP活性測試細胞分生能力，鍍鈣磷薄膜的比未鍍的分生能力強，在統計上各組之間沒有差異。最後利用細胞刮取儀量測細胞培養在試片上30分鐘後的黏附力，發現細胞在沒有溝槽的圖案比有溝槽的圖案之初期黏附力明顯較小。結果也證實具有微圖案化之單向性微米結構，會對細胞的形態及生理造成影響。

HA and Ca-P (calcium phosphate) ceramics are bioactive materials. We used physical vapor deposition (PVD) to coat Ca-P thin film on micropattern substrates. Because of PVD improve bone strength and osteointegration. Previous researches demonstrated the surface topography is the factor in controlling the shape, orientation, adhesion, proliferation and differentiation in mammalian cells. The aim in this study was to investigate the factors of Ca-P thin films and unidirectional micro-sized structures on the cell response. First, we used Si wafer to manufacture patterns by lithography and etching methods. Second, the micropatterns were coated with Ti and then coated with Ca-P by PVD. We used four different instruments (FE-SEM, thin film X-ray, EDX and -Step) to investigate the coatings. The results showed that we fabricated two different shapes (sharped and V-shaped) with both 2 m and 5 m micropatterns. Both of Ti and Ca-P thin films were deposited about 200 nm. In addition, coatings were evaluated with osteoblasts which incubated in different conditions: (1) unidirectional micro-sized structures or not (2) sputter coated Ca-P thin film or not (3) the depth and width of the patterns about 2 and 5 m. Results in cell morphology, osteoblasts aligned along the patterns and elongated in 1hr. In the cell proliferation and cell adhesion force, sharped-shape exhibited more biocompatibility than V-shaped. Ca-P thin film exhibited more ALP activity than non-coated substrates. It was showed that the unidirectional micro-sized structure affects cells behaviors.

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