中文摘要

　　電漿在表面處理、微電子及 環境保護等領域的應用正逐漸的增加，常壓電漿由於不需真空設備，比其他電漿製程的設備成本便宜很多。本研究主要的目的是建立高功率的非常壓冷電漿，期望能提高化學反應的效率及選擇率。

　　本實驗利用電弧放電電漿來進行高分子表面處理，利用接觸角量測分析、原子力顯微鏡分析（AFM）、X光光電子儀(XPS)、附著力測試等分析方法來鑑定表面處理後的結果。PC、PMMA及PP基板在經過電弧放電電漿表面處理之後，有機基板的表面型態以及表面組成都有很大的改變。這三種基板在表面處理之後，接觸角很明顯的降低，隨著處理時間增加表面型態改變也越來越明顯，處理過後的表面被氧化，並且留下一些極性的官能機，這些含氧的官能機對表面潤濕性以及附著力的提昇有很大的幫助。

Abstract

　　The applications of plasma are constantly increasing in the fields of surface treatments, microelectronics and environmental protection. Atmospheric plasma do not require the need of vacuum equipments, and are inexpensive in capital investment as well as in operation cost. The main challenge of this study is to develop a powerful non-equilibrium cold atmospheric discharge for chemical applications with high efficiency and high selectivity.

　　Arc discharge plasma treatments of polymer for surface modifications have been studied using contact angle measurement, atomic force microscopy(AFM)，X-ray photoelectron spectroscopy （XPS）and adhesive test. The arc discharge plasma is found to modify the PC、PMMA and PP surface in both the morphology and the composition. The contact angle is reduced dramatically for these three polymer substrates. AFM measurements show that changes in surface morphology appear to increase with extending processing time. Oxidation reaction results in oxidized polar groups on the processed polymer surface. These oxygen-containing groups contribute significantly to the increase of surface wettability and film adhesion.

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