在水資源日益缺乏情況下，生產製程如何管理水回收益顯迫切。國內科學園區雖然有規定製程回收率、全廠回收率、全廠排放率三項水量指標，僅以這些指標表示整個廠房的用水效率尚有不足，難以判別廠房內部的水資源再利用成效。從每日之水量指標表現來看，之中的起伏變化透露著廠房的用水需要，而製程用水為廠房用水的大宗，製程回收率有時會低於法規標準值。
為探討廠內的用水效率，本研究分析每日之製程回收率變化，找出半導體廠房製程用水回收量之變化原因。首先了解廠房水系統和製程用水回收系統之流程，分析廠房用水特性，接著建立詳細製程用水指標，依照指標評估流程，找出每日製程回收率表現之影響水量，並後續找出影響來源，透過訪問廠內實務工程師，找出影響製程回收率變化的原因。
研究結果指出，所建立之每日詳細水量指標，可以協助快速找出製程回收率的影響水量來源。另外，每日製程回收率變化的影響因子為：輕度汙染製程排水、純水系統回收水、製程系統總用水、回收系統產水，並說明各影響因子之影響來源。最後提出關掉回收系統來改善冬季回收水溢流，此做法可減少營運成本，亦減少對環境的負荷。

In the situation of water resources scarcity, the management of water recycling is an urgent issue in production process. Three water indicators of process water recovery, total water recovery, total water discharge are required by the science park. These indicators are insufficient to manage water operation, since they cannot measure internal water use effectiveness and water environmental performance. The daily water consumption reveals the water needs variation. The amount of water that the process use is large, and the values of process water recovery do not often meet the required standard.

To investigate the water use effectiveness, this research analyzed the variations of daily process water recovery rate, and explored reasons for recycling water quantity variations in the production process. First, the water system and procedures of recovery system in the production process were understood. Next, the indicators about water use in the production process were developed, and the factors of water quantity variations were proposed. Finally, five practical engineers of a semiconductor plant were interviewed to find out the reasons for recycling water quantity variations.

The research results show that the developed detailed water use indicators are useful in indicating the daily water variations and logic. The proposed water variation factors are low-pollution process wastewater, recycling water of pure water system, total water use of production process system, and water production from recycling system. Finally, the recycling systems can be turned off to improve recycling water overflow in the winter, to decrease operation cost and reduce the environmental impact.

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