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研究生： 楊曙宇
Yang, Shu-Yu
論文名稱： 添加Al2O3與Ca0.7Nd0.2TiO3陶瓷填充料對Ca-B-Si玻璃系統之介電與共燒行為影響之研究
Effects of the addition of alumina and Ca0.7Nd0.2TiO3 ceramic fillers on the dielectric properties and cofiring behavior of Ca-B-Si glass
指導教授： 向性一
Hsiang, Hsing-I
學位類別： 碩士
Master
系所名稱： 工學院 - 資源工程學系
Department of Resources Engineering
論文出版年： 2017
畢業學年度： 105
語文別： 中文
論文頁數： 78
中文關鍵詞： 低溫共燒 、介電 、玻璃+陶瓷 、Ca0.7Nd0.2TiO3 、CaO-B2O3-SiO2
外文關鍵詞： low temperature co-fired ceramics, glass+ceramic, Ca0.7Nd0.2TiO3, CaO-B2O3-SiO2
相關次數： 點閱：69  下載：1 
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    • 近年射頻元件不斷往高頻化、模組化趨勢發展，由於低溫共燒陶瓷可在低溫時與具高導電度之內電極(Ag,Cu)共燒，同時具有較高之Q 值，並可多層化，而被廣泛使用於各類無線通訊零組件中。本研究利用Al2O3及Ca0.7Nd0.2TiO3 (CNT)陶瓷粉末填充於（CaO-B2O3-SiO2）玻璃系統來製作低、中介電材料，並選擇將微波性能較佳之低、中介電材料堆疊進行共燒，來製作小型且薄型化之射頻元件及模組，以達到元件微小化與多功能化的需求。透過改變玻璃添加量與燒結溫度，觀察顯微結構、二次相對介電性質之影響與共燒之相容性。實驗結果顯示玻璃系統分別加入50 wt%之Ca0.7Nd0.2TiO3與Al2O3於900 oC燒結可達緻密，且分別促使兩者生成二次相sphene與 anorthite，有助於品質因子的提升，K值分別為 22和7。當兩者以刮刀成型技術製成薄帶後進行堆疊及共燒，顯示具有極佳之熱收縮匹配性及化學相容性。

    With the rapid development of the RF components toward smaller size, higher frequency, low-temperature-cofired ceramics (LTCC) are in great demand as the main components for wireless application. The CaO-B2O3-SiO2 (CBS) glass addition effects on the sintering behavior and dielectric properties of Al2O3 and Ca0.7Nd0.2TiO3 ceramics were investigated to develop low-K and middle-K LTCC in this study. Moreover, bilayer and sandwiched laminates were prepared by stacking low-K and middle-K green tapes to reduce the size of components. The results indicate that CBS glass can be used as a sintering aid to reduce the sintering temperature of CNT and Al2O3. The CBS glass added Al2O3 and Ca0.7Nd0.2TiO3 ceramics sintered at 900oC exhibited high relative density and dielectric constants of 7 and 22, respectively, which provides a promising candidate for LTCC applications. The secondary phases, CaTiSiO5 and CaAl2Si2O8, can improve the quality factors of CBS glass added Ca0.7Nd0.2TiO3 and Al2O3 ceramics. Bilayer and sandwiched laminates prepared by stacking low-K and middle-K green tapes after sintering exhibited excellent volume and chemical compatibility, suggesting that the shrinkage mismatch and interfacial reaction between low-K and middle-K LTCC during co-firing can be minimized by using the same CBS glass system.

    摘要 Ⅰ 誌謝 Ⅷ 目錄 X 表目錄 XⅣ 圖目錄 XV 第一章 緒論 1 1-1 前言 1 1-2 研究方向與目的 1 第二章 前人研究與理論基礎 3 2-1 玻璃系統與結構 3 2-1-1 玻璃結構 3 2-1-2 玻璃系統 7 2-1-2-1 矽酸鹽玻璃 7 2-1-2-2 硼酸鹽玻璃 8 2-1-2-3 硼矽酸鹽玻璃 9 2-2 介電微波陶瓷材料及其低溫共燒技術 12 2-2-1 Ca1-xLn2x/3TiO3高介電微波陶瓷 13 2-3 介電性質 14 2-3-1 介電極化 14 2-3-2 品質因子 17 2-4 燒結 18 2-4-1 固相燒結 18 2-4-2 黏性燒結 18 2-5 陶瓷基板材料 21 2-5-1 低溫共燒陶瓷 21 2-5-2 玻璃陶瓷基板系統 23 2-6 漿料 23 2-6-1 溶劑 23 2-6-2 分散劑 24 2-6-3 黏結劑 24 2-6-4 塑化劑 24 第三章 實驗方法及步驟 25 3-1 粉體備製 25 3-1-1 玻璃粉體的備製 25 3-1-2 高介電陶瓷粉體(CNT): 26 3-1-3 玻璃加陶瓷(CNT/Al2O3)粉體: 26 3-1-4 燒結體製備 26 3-2 材料特性分析 26 3-2-1 粉末之熱重/熱差分析 26 3-2-2 結構分析 26 3-2-3 燒結收縮曲線 27 3-2-4 密度量測 27 3-2-5 相鑑定 27 3-2-6 顯微結構觀察 28 3-2-7 微波性質量測 28 3-3 低溫陶瓷基板 28 3-3-1 低溫陶瓷基板之製程 28 3-3-2 薄帶層形貌觀察 29 第四章 結果與討論 31 4-1 Ca0.7Nd0.2TiO3 陶瓷塊材研究 31 4-1-1 結晶相分析 31 4-1-2 燒結行為與顯微形貌特徵 32 4-1-3 微波介電特性 33 4-2 CBS玻璃之研究 34 4-2-1 玻璃結構分析 34 4-2-2 玻璃性質分析 39 4-3 Ca0.7Nd0.2TiO3 /Al2O3 陶瓷+玻璃之低溫燒結塊材研究 41 4-3-1 Ca0.7Nd0.2TiO3+玻璃之相結構分析 41 4-3-1-1 玻璃配比 41 4-3-1-2 燒結溫度 43 4-3-1-3 二次相生成 46 4-3-2 Al2O3 +玻璃之相結構分析 48 4-3-2-1 玻璃配比 48 4-3-2-2 燒結溫度 50 4-3-3 燒結行為 52 4-3-3-1 Ca0.7Nd0.2TiO3/ Al2O3+玻璃之燒結行為 52 4-3-4 Ca0.7Nd0.2TiO3/Al2O3+玻璃顯微形貌特徵 57 4-3-4-1 Ca0.7Nd0.2TiO3+玻璃之顯微形貌特徵 57 4-3-4-2 Al2O3 +玻璃之顯微形貌特徵 58 4-3-5 微波介電性質 61 4-3-5-1 Ca0.7Nd0.2TiO3/ Al2O3+玻璃之微波介電常數 61 4-3-5-2 Ca0.7Nd0.2TiO3/Al2O3 +玻璃之品質因子 63 4-4 Ca0.7Nd0.2TiO3 /Al2O3 陶瓷+玻璃之低溫共燒基板研究. 64 4-4-1 陶瓷+玻璃之收縮測試 64 4-4-2 陶瓷共燒研究 67 第五章 結論 71 參考文獻 72

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