本論文旨在分析於奈米尺度下，鈷化學機械研磨製程中，研磨液的磨料二氧化矽與鈷金屬導線之間的摩擦行為與其所表現的機械性質。本研究採用分子動力學作為理論基礎，並搭配數值軟體LAMMPS分別建立磨料二氧化矽粗糙面對導線鈷粗糙面及磨料二氧化矽粗糙面對導線鈷平坦面這兩種模型進行不同的研磨參數如干涉值、粗糙度、速度之奈米摩擦模擬。模擬結果顯示，對於磨料二氧化矽粗糙面摩擦導線鈷粗糙面這組模型而言，干涉值的改變對於摩擦力、法向力及原子移除率都有顯著的影響；粗糙度的增加對於摩擦力與法向力有微幅的上升，但原子移除率則是隨之下降；速度的改變對於摩擦力、法向力及原子移除率皆無影響，僅能影響摩擦模擬的時間及作用區間之長短。而對於磨料二氧化矽粗糙面摩擦導線鈷平坦面這組模型而言，干涉值的改變對於摩擦力、法向力同樣有顯著的影響，並且從中發現了stick-slip現象；粗糙度的增加，使得摩擦力與法向力有些微的上升，鈷平坦面上的切屑也隨之減少並因而得到相對良好的表面加工品質；速度的增加除了讓摩擦力有些許的提升，同樣還能影響摩擦模擬的時間及作用區間之長短。本研究除了探討改變研磨參數的定向分析之外，還對這兩種不同的模型於奈米摩擦模擬過程中，內部應變及微結構變化進行詳細的探討，更能充分了解這兩種模型在相對應的實際情況下，其所表現出來的破壞機制與變形行為。

The purpose of this study is to analyze the friction behavior and mechanical properties between the abrasive silicon dioxide particles and the cobalt metal conductor wire in the cobalt chemical mechanical polishing process at the nanoscale. This study uses molecular dynamics as the theoretical basis and uses numerical software LAMMPS to establish two models of SiO2-Co: 1. Asperity surface-Asperity surface 2. Asperity surface-Flat surface. Then change three parameters such as interference value, roughness and velocity to simulate nano-tribological behavior. According to the simulation results, for model 1, the change of the interference value has a significant effect on friction, normal force and atomic removal rate. The increase in roughness slightly increases the friction and normal forces, but the atomic removal rate decreases accordingly. The change of velocity has no effect on friction force, normal force and atomic removal rate. It can only affect the time of friction simulation and the length of action interval. For model 2, the change of the interference value also has a significant effect on the frictional force and the normal force, and the stick-slip phenomenon was found in it. As the roughness increases, the frictional force and normal force increase slightly, and the chips on the cobalt flat surface also decrease. The increase in velocity not only increases the friction slightly, but also affects the duration and duration of friction simulation. In addition to discussing the directional analysis of changing parameters, this study also discussed the internal strain and microstructure changes of these two different models in the process of nano-friction simulation. Corresponding to the actual situation, it shows the destruction mechanism and deformation behavior.

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