本文研究中，主要目的為應用兩種不同的條紋反射法量測鏡面形貌，並探討兩種方法的差異性。兩種方法分別為向量式與法向量式，應用向量式量測小曲率之晶圓、法向量式量測大曲率之凸模具與凹模具，並將實驗量測的結果與表面粗度儀及位移感測計量測結果相比較其準確性，其量測高度變化30 μm之晶圓的均方根誤差為1.69 μm以內，量測高度變化18 mm之凸模具與凹模具的均方根誤差為0.22 mm以內。
在實驗中發現條紋間距越大，量測的試件形貌波浪狀越明顯；在量測大曲率試件時，為了避免試件斜率過大導致攝影機無法清楚地從試件觀察到螢幕畫面，應適時的傾斜試件再量測；在凹模具x方向積分時，因凹模具形狀關係，若只往左右方向積分會導致積分錯誤，一開始應先判斷試件之幾何形狀是否會造成積分中心軸或中心軸附近之斜率不存在，若有斜率不存在之情形，應先積分斜率存在之區域，再積分斜率不存在之區域，當斜率不存在時需往積分方向尋找鄰近之斜率點，再從此斜率點尋找周圍鄰近之積分結果繼續積分，直至所有斜率點完成積分。

The main purpose of this study is to measure the specular profile using two different fringe reflection methods as well as exploring the differences between the two methods. The two methods performed in this experiment include the vector method and the normal vector method. They are used to measure the wafer and the male die as well as the female die, respectively. Finally, the results of these experiments are then compared using the surface roughness meter and displacement sensor. The root-mean-square error (henceforth, RMSE) of the wafer with 30 μm of range of height is found to be within 1.69 μm. The RMSE of the male die and female die with 18 mm of range of height is found to be within 0.22 mm.
In the experiment, it is observed that the larger the pitch of fringe, the more visible the wave profile of the specimen. In order to avoid the slope of the specimen being too large, which may ultimately cause the camera to not be able to clearly observe the image on the screen from the specimen. The specimen must be properly tilted.
When integrating the x-direction of the slope of a female die, the female die geometry relationship will cause integrations that occur only in horizontal directions to commit integral errors. It should be priorly determined whether or not the geometry of the specimen will cause the slope in the central axis of the integral or the area near it to be absent. If the slope is indeed absent, the area where the slope exists should be integrated first, followed by integrating the area where the slope does not exist. It is also necessary to find the adjacent slope point in the direction of such integration then search for the integration result of the surrounding from the slope point. Continue the integration until all the slope points have completed their respective integration.

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