原子力顯微鏡系統可經由控制壓電致動器之掃描精度以獲得奈米級解析度之影像。然而，其掃描精度會受到系統參數變化、壓電致動器遲滯、潛變等非線性現象以及外界干擾影響。因此， 本文目的是分析並實現原子力顯微鏡之控制方法以提升其掃描精度。為了達到此目地，我們以接觸式固定作用力模式進行掃描，並運用適應控制法控制顯微鏡的z軸探針系統以提升其性能。首先，以步階響應建立z軸探針系統之標稱模型，並加上以有限脈衝響應(FIR)型式的系統補償量，來降低系統建模誤差。接著透過系統反模型之控制器消除樣品對探針之干擾，來達到維持探針與樣品間之作用力等於設定值的目的。由實驗結果可知，使用建議之控制方法確實在掃描過程中消除樣品對z軸探針之干擾，使得探針在掃描過程中精確地追蹤樣品之形貌。

Atomic force microscopes (AFMs) can be used to get high resolution images at nano-meter level by controlling the piezo-actuators to increase scanning accuracy. However, the scanning accuracy is affected by the system variations, nonlinear phenomena of the piezo-actuators such as hysteresis and creeping, and external disturbances. Therefore, the purpose of this research is to analyze and implement how to control an AFM properly such that it scanning accuracy can be improved. In order to achieve this goal, under constant-force-mode operation, adaptive control scheme is utilized in controlling the z-axis probe system of an AFM to improve its performance. At first, a nominal model of the z-axis probe system is established based on its step response, and modeling errors are compensated for by adding corrective quantities in a finite-impulse-response (FIR) form. Then, the interaction force between the probe and the sample is kept to our desired value by using an inverse-system–based controller to reject external disturbances. Experimental results show that, with the proposed control scheme, disturbances from the sample can be rejected and the probe can track the sample topography precisely.

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