隨著醫療科技的發展，人們為了降低侵入式的檢查及治療所帶來的不適感及降低治療可能造成後遺症，並加快復原的速度，醫療用微型機器人成為一個熱門的發展趨勢，而這些微型機器人必須有諧振器作為其運轉及蒐集數據資料的功能，驅動此機器人最重要的便是超音波馬達，而驅動其運作的便是壓電材料所製成的微機電元件，由於其應用於人體當中，人們對微型機器人的操作及追蹤能力尚不足，為此微諧振器穩定性發展尤為重要。為了提高其穩定性需更加深入了解其振盪過程中所造成的能量耗散。
本研究將建立壓電懸臂樑熱彈性阻尼的模型，分析材料熱特性及壓電應力常數的影響。分為以下幾個部分討論：第一、分析電壓及壓電應力常數在穩態下對不同驅動模式變形影響，第二、分析單層熱彈性材料參數及壓電應力常數的影響，第三、分析尺寸效應對特徵頻率、阻尼因子及品質因子影響，第四、分析複合壓電懸臂樑，帶有質量塊及三層非對稱結構壓電懸臂樑對不同驅動模式的表現。
從模擬可知，壓電效應使材料變形所造成的熱應力作用明顯，不可忽略，因此將探討材料熱特性及方向性對壓電懸臂樑熱彈性阻尼影響，且對於不同壓電懸臂樑驅動模式有不同程度上的變化，因此深入分析其對熱彈性阻尼的影響。

The piezoelectric thermoelastic damping model is established, and the influence of different axis’s thermal properties is an important index of thermoelastic damping. In steady-state analysis, the research shows different driving mode of piezoelectric cantilever, and different electromechanical coupling coefficient’s influence. The dynamic analysis, we shows the transversely isotropic thermal properties have the significant influence when the piezoelectric thermoelastic damping. The composites piezoelectric discusses the influence piezoelectric material in different layer and a mass damper in different site’s influences.
In the research, thermal expansion coefficient has the significant influence in the length. Thermal conductivity coefficient has the significant in the thick. When the piezoelectric beam in high vibration modes has different influence.

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