本論文主要目的在於評估離子束沈積純類鑽碳(a-C:H)及含氮類鑽碳(a-C:H(N))薄膜與底材之間的附著能量以及由刮痕試驗得到之臨界負荷，並針對不同的含氮量及膜厚探討其附著能量的變化。在理論部份，當刮痕試驗中薄膜已剝落而達到臨界負荷時，探針頭已經刮到底材，因此藉由球殼內部受一均勻壓力推導出球殼內的應力及應變分佈。以此應力、應變分佈來模擬底材因探針頭的刮動而產生的應力、應變，再由底材和薄膜間的應變一致性推得薄膜的彈性儲存能而導出薄膜和底材之間的附著能量，以評估在何種條件下所鍍製的類鑽碳薄膜會有較好的附著性能。在實驗部份，利用奈米測試機，由不同的刮痕速度及負載速度得到的臨界負荷值，利用曲面應答法歸納出在何種條件下可得臨界負荷的極值，再使用曲面應答法所歸納出的實驗條件進行附著能量的評估。此外，將試片的應力分佈所估算出的附著能量減去用壓痕試驗得到薄膜剝落所需的能量，才是薄膜與底材之間真正的附著能量。除此之外，本論文也利用三維表面微細形貌量測儀獲得之鍍膜前後表面形貌數據，求得薄膜的殘留應力。

在試片的檢測部份，我們利用了化學分析電子儀及拉曼光譜儀分析薄膜之元素組成及其鍵結，並且用原子力顯微鏡觀察其表面形貌。在抗磨耗性能研究方面，使用奈米測試機以不同的刮痕速度及不同的荷重刮過試片表面，計算其磨耗量來分析試片的抗磨耗性能。

由實驗結果可得知，當類鑽碳薄膜的氮含量提高時，其刮痕試驗得到的臨界負荷值會變大，但是當氮含量達到66%時，因為類鑽碳膜已有石墨化的現象，臨界負荷值則會急據的下降。而若是在相同厚度，含氮量也相同的類鑽碳膜，當臨界負荷越大時表示其殘留應力越小，則附著能量也就會較大。

The adhesion energies and critical loads of a-C:H and a-C:H(N) diamond like carbon films coated by ion beam deposition by scratch tests are researched in this study. The effect of nitrogen containing and film thickness to the adhesion energies is involved, too. In the theoretic analysis, the stress and strain distribution of sample under critical load causing film to strip off from substrate are derived from the uniform pressure in spherical shell. By simulating the stress and strain of substrate under scratch test and the continuality of strain between film and substrate, we derived the elastic storage energy of film and calculated the adhesion energy between film and substrate. In experimental parts, the critical loads are measured from scratch test under different scanning speeds and loading rates performed by the NanoTest and the Surface Response Method is used to analyze the measured critical load data. Furthermore, the adhesion energies are modified by the indentation tests. The residual stresses of films are calculated by the surface profiles measured before and after coating by 3-D profilemeter.

In examining samples, we measured composition and bonding by Chemical analyzer and Raman spectrum, and measured surface by Atomic Force Microscope. In researching anti-wear properties, we calculated the wear volumes of scratches under different speeds and loads by NanoTest.

According to the experimental results, the critical loads are higher as more nitrogen containing; however, the critical load of the film of 66 percent nitrogen containing is very low because of much graphitizing. Under the condition of the same film thickness and nitrogen containing, the higher critical load indicates the smaller residual stress and larger adhesion energy.

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