有鑑於台灣光電產業發展蓬勃，TFT-LCD蝕刻製程排放高濃度含磷廢液，主要成分包括磷酸、硝酸、醋酸與微量(<0.5wt%)的鋁、鉬等金屬元素。本研究與廠商合作開發技術以回收及資源化鋁蝕刻廢液。初步測試減壓分餾、真空薄膜蒸餾、低溫結晶及流體化床結晶技術處理廢液。其中真空薄膜蒸餾無法有效分離硝酸、醋酸與磷酸；低溫結晶技術分離金屬離子與磷酸需經過多次再結晶才能純化磷酸，尚有研究空間；而減壓分餾能分離鋁蝕刻廢液中之硝酸；另外，流體化床磷酸鐵結晶技術可藉由化學沉澱於混和酸中產出FePO4·Fe(OH)3之複合物。因此本研究主要針對串聯減壓分餾及流體化床結晶技術回收鋁蝕刻廢液。研究以100 g 鋁蝕刻廢液進行，先以減壓分餾分離鋁蝕刻廢液中之硝酸、醋酸與磷酸，結果顯示將溫度控制為150 oC、真空度為-700 torr時，可分離醋酸(7.49 g)與硝酸(4.81 g)及少量磷酸(5.03 g)至蒸餾端，殘餘液部分則含有磷酸(50.31 g)與鋁、鉬等金屬元素( ~ 0.42 g)；之後利用流體化床反應器處理含磷酸蒸餾液，並回收磷酸鐵結晶。以硫酸鐵為沉澱劑及磷酸亞鐵為晶種，進料之蒸餾液磷酸濃度稀釋至11.6 mM，結果顯示流體化床程序回收廢水磷酸所得磷酸鐵平均粒徑為1 mm，XRD證實其晶相為非晶相，並且處理效果與pH、進料莫耳比等影響磷酸過飽和度之因子有關。控制操作條件為：截面負荷 = 0.688 kg-P m-2 h-1、pHe = 2.30 ± 0.1、Fe/P = 1.2，可達最佳除磷效率為95%，結晶比例為82%。鋁、鉬等殘留在殘餘液之金屬離子則將在後續繼續研究並利用低溫結晶進行分離回收。經過本研究減壓分餾及流體化床串聯技術後，可回收82 %以上之磷酸，而硝酸、醋酸及其他金屬離子待後續以其他技術進行回收處理。

In view of the vigorous development of Taiwan’s optoelectronic industry, the TFT-LCD etching process discharges high-concentration phosphorus-containing wastewater. The main components include phosphoric acid, nitric acid, acetic acid and trace amounts (< 0.5 wt%) of aluminum, molybdenum and other metal elements. This research is to develop a series of process to recycle and reuse the spent aluminum-etching wastewater. Preliminary tests for vacuum fractional distillation (VFD), vacuum membrane distillation (VMD), melt crystallization (MC) and fluidized-bed crystallization (FBC) to recovery the spent wastewater. Among them, only VFD and FBC could be used to recover phosphoric acid effectively. Therefore, this study mainly focuses on the series of VFD and FBC which was carried out with 100 g of wastewater. Nitric acid and acetic acid were first separate from wastewater by VFD. When the temperature is 150 oC with -700 torr of pressure, acetic acid (7.49 g), nitric acid (4.81 g) and small amount of phosphoric acid (5.03 g) could be separated to the permeate, around 50.31 g of phosphoric acid and metal ions (0.42 g) are remained in residue. Then, use FBC to recover the remaining phosphoric acid from the permeate to produce iron phosphate. When the feed is 11.6 mM-P, the operating conditions were: surface loading = 0.688 kg-Pm-2h-1, pHe = 2.30 ± 0.1, Fe/P = 1.2, the optimum phosphorus removal efficiency was 95 % and the crystallization ratio was 82 %. For the series of VFD and FBC, around 82 % of phosphoric acid can be recovered.

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