隨著可撓式電子時代的來臨，兼具柔性與溶液製程優勢的導電高分子，已成為實現軟性顯示器與穿戴式感測器等創新應用的核心材料。然而，這類材料的導電性能高度依賴其薄膜中的分子排列，因此，建立能準確評估其微觀電性的方法，對於材料開發至關重要。本研究建立一套結合具備奈米級空間解析度的原子力顯微鏡（Atomic Force Microscopy, AFM）與電化學阻抗頻譜（Electrochemical Impedance Spectroscopy, EIS）進行電性量測，雖能提供高解析度，但奈米尺度量測中探針—樣品接觸面積極小，容易產生高接觸電阻，干擾薄膜本徵電性的判讀。
為突破此量測困境，本研究旨在建立一套完整的微區阻抗分析方法學。透過系統性地調控探針與電極的幾何關係，以釐清不同物理參數對量測的影響。為根本性地改善探針與樣品之接觸介面，本研究將探討以液態金屬進行探針表面改質，期望能形成更理想且穩定的電性接觸，以降低量測的不確定性。同時，本研究亦建構了一套環境濕度調控系統，用以分析環境因子在奈米尺度下，對電性量測穩定性與再現性的影響。藉由此整合性的實驗設計，為軟性半導體材料的性能評估，提供一套標準化的量測與分析基準。
綜上所述，本研究不僅提出可精確解析奈米尺度下接觸電阻與薄膜電阻之量測與分析方法，亦開發出以液態金屬改質探針有效降低接觸電阻的解決方案，並釐清環境濕度在微區電性量測中的作用機制。此成果為有機半導體材料之性能評估與元件介面設計提供可靠之理論與技術基礎。

With the advent of the flexible electronics era, conductive polymers—offering both mechanical flexibility and solution-processability—have emerged as key materials for innovative applications such as flexible displays and wearable sensors. Their electrical performance, however, is strongly dependent on the molecular arrangement within thin films, making accurate evaluation of their microscopic electrical properties essential for material development. This study establishes a nanoscale electrical characterization approach by integrating Atomic Force Microscopy (AFM) with Electrochemical Impedance Spectroscopy (EIS). While this combination offers high spatial resolution, the extremely small probe–sample contact area in nanoscale measurements often induces significant contact resistance, obscuring the intrinsic film properties.
To address this challenge, a comprehensive localized impedance analysis methodology is developed. By systematically tuning the geometric relationship between the contact surface of probe and thin film, the method clarifies the influence of different physical parameters on measurement outcomes. Furthermore, liquid metal modification of AFM probes is explored to achieve more stable and ideal electrical contact, while a controlled-humidity environment is implemented to assess the impact of ambient conditions on measurement stability and reproducibility. This integrated framework provides a standardized basis for the nanoscale electrical evaluation of flexible semiconducting polymers, supporting their optimization and device interface engineering.

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