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研究生: 鄭文傑
Cheng, Wen-Chien
論文名稱: 微壓電陣列感測於力量量測之探討
Investigation of Piezoelectric Sensor Array in Force Measurement
指導教授: 張志涵
Chang, Chih-Han
林哲信
Lin, Che-Hsin
學位類別: 碩士
Master
系所名稱: 工學院 - 醫學工程研究所
Institute of Biomedical Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 中文
論文頁數: 53
中文關鍵詞: 壓電陶瓷材料訊號漂移陣列式壓力感測元件咬合力微機電製程
外文關鍵詞: Drift, Piezoelectric Material, Force Sensor Array, Bite Force, micro-electro-mechanical system
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  • 牙齒主要功能為傳遞咬合力至食物,現階段牙科生物力學之研究中,量測咬合力量大小皆僅侷限在咬合力之合力,目前為止尚無適用之量測元件可量測咬合或咀嚼時力量在牙冠表面上之分佈情形,而咬合力於齒冠分佈是影響牙科臨床補綴成功與否的重要依據,另外在牙科力學分析上給定牙冠上之分佈力也無明確數據參考。
    本實驗利用壓電陶瓷材料設計微小化之力量感測元件及陣列式壓力感測元件,利用微機電製程(MEMS)製造厚度為150微米之電極,藉此微小化其壓力感測元件,利用材料試驗機對力量感測元件進行壓力給定,以量測元件受壓後電荷釋放之情形,利用電荷與力量之關係設計可用之力量感測元件。研究使用高頻量測方法,利用高頻量測可有效排除訊號漂移現象(Drift),利用此方式擷取訊號後再將高頻訊號積分轉換,可將高頻訊號轉成實際代表力量之訊號,由此量測方法可對於咬合力進行量測,但其限制為對靜態負載之低頻訊號,訊號失真程度將過大將造成量測誤差增加。此外對於陣列式壓力感測元件初步實驗發現,本壓力感測元件並無Cross Talk現象,不會對量測時造成影響。

    One of the primary functions of tooth is to provide bite force for food chewing. However, in dental biomechanics, currently, the only available force data is the maximal occlusive force. There is no device accurately enough to reflect the bite force on the crown not to mention the measuring of the distribution of bite force on the crown, which is important for many clinical dental treatments. The development of a device to measure the bite force, as well as its distribution on the crown, is thus an important issue needs to be addressed in dental biomechanics.
    The ultimate purpose of this study was to construct a micro force sensor array system to measure the bite force. In this thesis, the characteristic of using piezoelectric material as the sensor array was evaluated. By using micro-electro-mechanical system approach, 150μm-thick copper foil electrode was fabricated in order to reduce size of the system. By using material testing system, the force calibration curve of the piezoelectric sensor was obtained with high frequency sampling method which excluded the Drift effect. By integration the high frequency sampled signals the applied force signals can be measured with acceptable accuracy as long as the static loading mode is minimal. For the sensor array system, the Cross Talk effect did not occur and the force summation is acceptable provided that the spacing between sensors is small enough.

    中文摘要 I Abstract II 致謝 III 目錄 IV 表目錄 VI 圖目錄 VII 第一章 緒論 1 1.1前言 1 1.2 壓電材料 2 1.3 文獻回顧 4 1.4 研究動機與目的 7 第二章 材料與方法 8 2.1 儀器與元件 8 2.1.1 材料試驗機(MTS) 9 2.1.2 壓電材料 10 2.1.3 MEMS電極製程 11 2.1.4 Charge Meter 17 2.1.5 訊號輸出量測系統 18 2.2 建立量測方法與系統 19 第三章 結果與討論 22 3.1 MTS慢速給力量測結果與討論 23 3.2 MTS快速給力量測結果 33 3.3 陣列式壓力感測元件測試 38 3.3.1 Sensor Array 校正 39 3.3.2 Sensor Array分力量測 40 3.3.3 Cross Talk 45 3.4 壓電材料破裂之探討 46 3.5 Limitation 48 第四章 結論與未來展望 49 4.1 結論 49 4.2 未來展望 50 參考文獻 51 附錄 52 附錄1 52 附錄2 53

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    [2] G.Gautschi. "Piezoelectric Sensorics"2001 Springer.

    [3] Mericske-Stern R, Assal P, Buergin W. "Simultaneous force measurements in 3 dimensions on oral endosseous implants in vitro and in vivo."A methodological study. Clin Oral Implants Res l996;7: 378-86.

    [4] Ferrario VF, Sforza C, Zanotti G, Tartaglia GM. "Maximal bite forces in healthy young adults as predicted by surface electromyography."J Dent 2004;32: 451-7.

    [5] Okiyama S, Ikebe K, Nokubi T. "Association between masticatory performance and maximal occlusal force in young men." J Oral Rehabil 2003;30: 278-82.

    [6] Bousdras VA, Cunningham JL, Ferguson-Pell M, Bamber MA, Sindet-Pedersen S, Blunn G, Goodship AE. "A novel approach to bite force measurements in a porcine model in vivo." Int J Oral Maxillofac Surg 2006;35: 663-7.

    [7] 林江諭. 微壓電感測器系統於咬合力量測之探討. 2007.

    [8] 萬能材料試驗機AG-I 系列操作說明書.

    [9] 黃清弘. PVDF 壓電陣列感測器之製作、校正;及應用. 2005.

    [10] 莊達人. VLS製造技術. 2003 高立出版社.

    [11] Kistler Charge meter 5015-A Manual.

    [12] 林江諭. 微壓電感測器系統於咬合力量測之探討. 2006.

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