傾斜感測器應用於檢測水平位置，對於土木建築工程、機械工作平台以及汽車防盜裝置，是一不可或缺之儀器。本研究乃利用微機電系統之設計及製程技術，設計及製作一新式傾斜角度感測器。而感測器之製作，首先於玻璃基材之表面研磨一圓弧面，並於圓弧面上佈置正負電極導線，接著將水銀液滴滴入圓弧面之底端以達到平衡。當水銀液滴接觸兩正負電極，電流隨即通過水銀液滴本身，並經由電路系統顯示傾角數值，如此便可定位出水銀所傾斜的位置角度。
　　本研究所提出之新式傾斜角度感測器乃應用微機電系統之設計及製程技術，成功地改善傾斜感測器之關鍵技術，將水銀液滴之接觸角由130度增加到140 度，且縮小感應電極之間距，可提升感測器之解析度至0.2度。此外，做為感測原件之水銀液滴，是以重力來做為移動方式，故可避免因外在因素如溫度、電磁力、電波等變化而影響傾斜感測器之準確度。
　　而利用微機電系統之設計及製程技術來製作傾斜角度感測器，除使用較簡單的設計方式來達到高精度的角度感測，相較於市面上販售的感測器結構更為簡單，更可應用於批製造以降低成本。

　　The present study reports a new micromachine-based inclination sensor which could be used to measure the level of inclination in fields of civil engineering, mechanical engineering, auto-making and many others.The sensor is designed and fabricated by using MEMS (Micro-Electro-Mechanical-Systems) technology. The inclination sensor is fabricated on a glass substrate with a curved geometry. Then
microelectrodes are patterned on the curved surface. A drop of mercury is dripped at the bottom of the curved surface.The location of the mercury drop is then displayed using LED (Light Emitting Diode) to indicate the inclination while a driving current passes through the mercury drop and the electrodes.
　　The new inclination sensors have been successfully characterized to have a resolution of 0.2°. A surface treatment has been applied to increase the contact angle between the mercury drop and the glass substrate from 130 ° to 140 ° such that the developed sensor could have a higher sensitivity. To improve the resolution and sensitivity of the inclination sensors, the layouts of the microelectrodes is optimized. Beside, a control circuit has been designed and used to integrate with the inclination sensor. The development of the micro inclination sensor could be promising for measurement of the inclined angles for different fields.

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