高科技產業隨製程技術與產品規格要求，用水水質及需求量提高，新廠或擴建的規劃設計需考量不同方案，有效作好水資源回收及管理，以降低對原水的依賴。
本研究建構半導體廠房水回收系統設計的方案，利用某半導體公司廠房做個案研究，納入相關廠務人員組成研究小組，分析過去資料、經驗。首先找出水回收系統發展四個面向的26個設計因子，在符合成效與專案階段要求下，四面向重要性依序為需求、技術、成本、法規。並得到各個面向因子於回收率達成、建廠時效、操作便利、操作安全等四個成效考量下之重要性排序。再以三個廠房建構經驗，得出搭配設計因子之隱性法則。
設計因子考量法則在「規劃設計」階段之使用程度最高，其次是「系統運轉」階段，「建造」階段最少，表示對半導體廠房水回收系統設計，在規劃設計時考量各因子，較能達到目標。並歸納設計因子考量法則的重要程度，依系統功能分類，處理系統排序依序為：廢水回收、製程廢水直接回收、廢水處理系統、超純水處理回收，基礎系統排序為：廢水分流收集、水源儲存及分配、次級用水系統。
利用上述結果，依照個案廠務建構及運轉經驗，以回收比率、投資成本、運轉成本綜合分析，得到廢水回收子系統建構順序。最後依所得結果，提出半導體廠房水回收系統四個策略方案，為「一次到位」、「一次到位兩階段擴充」、「系統逐步建構」、「系統逐步建構併兩階段擴充」，可供不同廠房大小、不同資源狀況或條件的情況參考使用。

Water quality and demand have raised since the high-tech industry has proposed higher process and product standards. Consequently, for planning and designing new plants or expansion, water recycling and management should be addressed to lower the demand of water.
The study established water recycling system design for semiconductor plants. The case study was conducted with three fabs of a semiconductor company. The related facility members were formed a team to analyze past information and utilize experiences. First, twenty-six factors for water recycling system design were identified in four dimesions of demand, technique, cost and regulations. The importance of the factors relies on recycling rate achievement, effectiveness of fab construction, operation safety and operation convenience. Moreover, three fab construction experiences offered implicit design principles.
Design factors are prevalent in the design stage, then the system operation stage, and the least in the construction stage. Therefore, Semiconductor fab water recycling system design can better achieve the goal in the design stage. When considering the significance of design factors, the order for processing function systems would be: waste water recycling, processing waste water direct recycling, waste water treatment system and ultra pure water recycling. The priority of basic systems would be: waste water divergence and collection, water resource storage and distribution, and sub-water system.
Based on prior facility construction and operation experiences, the sequence of waste water recycling sub-system is developed through analyzing recycling rate, investment cost and operation cost. The results contributed to four strategies of semiconductor fab water recycling system: one-time work, one-time work with two stage expansion, step-by-step system development, and step-by-step system development with two stage expansion. The four strategies can be used on other conditions such as different sizes of fab with different resources.

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