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研究生： 汪逸涵
Wang, Yi-Hang
論文名稱： 改變DC頻率與底材偏壓於類鑽碳鍍層之磨潤與鑽削性能研究
Tribological and drilling performance of DLC films with changed DC power frequency and substrate bias voltage
指導教授： 蘇演良
Su, Yean-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2009
畢業學年度： 97
語文別： 中文
論文頁數： 184
中文關鍵詞： 類鑽碳 、DC頻率 、底材偏壓
外文關鍵詞： substrate bias voltage, DC power frequency, DLC
相關次數： 點閱：52  下載：1 
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    • 本實驗利用非平衡磁控濺鍍系統，濺鍍固體碳靶及鋯靶，被覆含鋯氫類鑽碳膜。主要目的為研究改變DC power frenqency和底材偏壓對於含鋯氫類鑽碳膜的磨潤性質與被覆刀具之乾切削性能。
    實驗中鍍膜被覆共分為三階段：第一階段，主要目的為探討改變DC power frenqency對於；第二階段，改變底材偏壓的大小，得到不同偏壓大小的鍍膜，探討不同偏壓大小對鍍膜磨潤性質的影響，以掃瞄式電子顯微鏡(SEM)與能譜儀(EDS)對鍍層斷面及磨耗面分析。
    由第一階段鍍膜被覆得知：鍍膜硬度會隨著頻率的升高至70KHz後而下降；而改變頻率，則會改變鍍膜組織，經SRV磨耗試驗證實頻率為70KHz時，在赫茲應力很小時，鍍膜有最高的抗磨耗性，而不同磨耗機制，針對不同鍍膜下有不同表現，以點磨而言赫茲應力極大時，附著力較佳之鍍層抗磨耗特性較佳，如110KHz。
    經第二階段鍍膜被覆我們得到偏壓再第一階段設定之42偏壓值，有氫碳膜擁有較低摩擦係數與較高的抗磨耗性且由拉曼光譜儀(Raman Spectroscopy)觀察各鍍膜結構的sp3/sp2鍵結比例變化及G、D 波峰偏移的位置來比對SRV磨耗實驗的結果，最後將鍍膜應用於微鑽針以及車刀刀片上，發現與SRV磨耗試驗結果一致，DC頻率為70KHz時表現優於其他頻率鍍層，適當頻率與較低的偏壓下可以改善鍍膜抗磨耗性，提升刀具的使用壽命。

    The main purpose of this study is to research the tribological properties and cutting performance of a-C:H coatings prepared by sputtering graphite and Zirconium targets with unbalanced magnetron sputtering system.
    It contains two stages of research in the study. We focus the influence of DC power frequency on the properties of coatings in first stage. We change the bias voltage of substrate to get various substrate bias voltage of coatings in second stage.
    In first stage, We change the frequency of DC power to get various frequency films structure for a-C:H coatings. We confer in what kind of parameter had the best tribological performance and use SRV to study the resistant abrasion of films. The films cross-section and wear surface analysis be used by SEM and EDS. Through the research of the first stage we know that the hardness of the coatings decrease and the adhesion of the coatings increase with the 70KHz. After SRV tribological test we verify that the coating prepared under the 70KHz has highest wear resistance and adherent properties.
    We got coatings with substrate bias voltage range from 42 to 62 in second three stage. Through the study we can know that low substrate bias voltage contributes to the adhesion of the coatings and the coatings have the lower friction coefficient and higher wear resistance. Then we will be use Raman Spectroscopy observed the variety of sp3/sp2 bond proportion of films structure and G、D peak position deflection to compare the result of resistance wear test.
    Finally, we would obtain the best DC power frequency for apply cutting tool and PCB drilling needle as the same as SRV test results that DC power frequency for 70KHz better than other value. The suitable DC power frequency and low substrate bias voltage promote the tool life and wear resistance properties.

    第一章 緒論 1 1 – 1 前言 1 第二章 理論基礎與文獻回顧 3 2 – 1 DLC基本特性 3 2 – 2 DLC膜製程方法 3 2 – 3利用非平衡磁控濺鍍法製DLC膜的特性 4 2 – 4 奈米壓痕分析於薄膜上的應用 5 2 – 5 赫茲接觸應力在磨耗方面之應用 6 2 – 6 拉曼光譜分析在類鑽碳膜上的應用 7 第三章 實驗方法與步驟 8 3 – 1 實驗目的 8 3 – 2 實驗流程 8 3 – 3 鍍膜製作與實驗方法 8 3 – 3 – 1 濺鍍參數與鍍膜安排 8 3 – 3 – 2 濺鍍系統與靶材配置 9 3 – 3 – 3 鍍膜顯微結構分析 9 3 – 3 – 4 鍍膜成分與元素分佈分析 10 3 – 3 – 5 硬度實驗 10 3 – 3 – 5 - 1 微硬度試驗 10 3 – 3 – 5 - 2 奈米硬度試驗 10 3 – 3 – 6 附著性實驗 11 3 – 3 – 6 - 1壓痕實驗 11 3 – 3 – 6 - 2刮痕實驗 11 3 – 3 –7 磨耗實驗 11 3 – 3 – 7 - 1 SRV往復式磨耗試驗 11 3 - 3 – 7 - 2 Pin-on-disk 磨耗試驗 12 3 – 3 – 8 乾車削實驗 12 3 – 3 – 9 PCB鑽削實驗 12 3 – 4 實驗設備 13 第四章 實驗結果與討論 15 4 – 1 第一階段鍍膜基本性質 15 4 – 1 – 1拉曼光譜分析、鍍層結晶構造 15 4 – 1 – 2頻率變化對鍍膜硬度之影響 16 4 – 1 – 3 第一階段鍍膜之附著性 17 4 – 1 – 4 第一階段鍍膜SRV磨潤性能測試 17 4 – 1 – 5 第一階段鍍膜實驗結果整理與討論 21 4 –2 第二階段鍍膜基本性質 21 4 – 2 – 1 拉曼光譜分析、鍍層結晶構造 22 4 – 2 – 2 改變偏壓對鍍膜硬度之影響 22 4 – 2 – 3 第二階段鍍膜之附著性 23 4 – 2 – 4 第二階段鍍膜磨潤性質測試 23 4 – 2 – 5 第二階段鍍膜實驗結果整理與討論 25 4 – 3 鍍膜磨潤性質分析 25 4 – 4 Pin-On-Disk 磨潤性質測試 26 4 – 5 赫茲應力對鍍膜磨耗特性探討 26 4 – 6 H/E Ratio 與點接觸磨潤特性探討 27 4 – 7 NIT(%)與磨耗特性探討 28 4 - 8車削磨耗試驗 28 4 – 9 PCB 微孔鑽削實驗 29 第五章 結論 30 5 - 1 結論 30 5 - 2 未來展望 30 第六章 參考文獻 32

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