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研究生： 李曠緯
Li, Kaung-Wei
論文名稱： 氮化鎢/氮化鈦多層膜磨潤性質研究
Tribological properties of WN/TiN mutilayers
指導教授： 蘇演良
Su, Yean-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2012
畢業學年度： 100
語文別： 中文
論文頁數： 103
中文關鍵詞： 氮化鈦 、氮化鎢 、多層膜 、磨潤
外文關鍵詞： WN, TiN, mutilayers, tribological
相關次數： 點閱：144  下載：3 
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    • 本研究採用封閉式非平衡磁控濺鍍，探討單層WN，單層TiN以及WN/TiN多層膜在初鍍狀態以及經過500℃、600℃熱處理後表現出的晶體結構、機械性質、抗磨耗性質等；實驗總共分成三階段；第一階段為改變氮氣流量製備單層WN鍍層，探討氮氣流量對於WN鍍層之影響；第二階段選用第一階段最佳之流量參數，改變靶材電流，找出最佳的電流參數；第三階段則是以第二階段最佳參數製備WN/TiN多層膜。
    實驗結果顯示，氮氣流量的提升可以提升WN鍍層的硬度，但是過多的氮氣反而造成鍍膜內應力過大而剝落。靶材電流增加無法形成更多的氮化鎢，對於鍍膜性質也沒有很大的影響。多層膜有助於提升鍍膜的硬度以及抗磨耗能力，其中編號W-1多層膜擁有最佳的抗磨耗能力；但是多層膜在熱處理後性質無法得到提升，其中在600℃熱處理後鍍膜產生大量氧化，甚至因為膨脹係數的不同導致破裂。

    WN and TiN monolayer coatings and WN/TiN multilayer coatings are deposited on the SKH51 HSS disk substrate by closed-field unbalanced magnetron deposition process. To find the best WN/TiN multilayer, this experiment is dived into three stages. In the first stage, the WN monolayer coatings are deposited in different N2 gas flow rate, to investigate the influence of N2 gas flow rate on microstructure, mechanical properties and wear resistance of coatings, and chose the best N2 flow rate to the next stage. In the second stage, WN monolayer coatings are fabricated in different target current with the chosen N2 flow rate from first stage. In the third stage, WN/TiN multilayer coatings are deposited by the ideal N2 flow rate and the target current in different modulation.
    The WN monolayer coatings hardness increase with the N2 flow rate, but the highest N2 flow rate coating showed poor adhesion because of the N2 impeding. Target currents effect the coatings grain structure and properties slightly. The WN/TiN multilayer coatings showed great hardness and wear resistant, but less improvement in oxidation resistant.

    摘要 II Abstract III 誌謝 IV 總目錄 V 表目錄 VII 圖目錄 VIII 附錄 X 第一章 緒論 1 1-1 前言 1 1-2 研究動機 1 第二章 理論探討與文獻回顧 3 2-1 磁控濺鍍理論 3 2-2 氮化鈦及其目前應用 4 2-3氮化鎢及其目前應用 6 2-4 應力釋放和熱處理 7 2-5 多層膜 8 2-6 鍍膜與切削 9 2-7 國內相關之研究 10 第三章 實驗方法與步驟 12 3-1 實驗目的 12 3-2 實驗流程 12 3-3 實驗方法與規劃 13 3-3-1 鍍層參數與鍍膜安排 13 3-3-2 實驗材料 13 3-3-3 氧化實驗 14 3-3-4 成份分析 14 3-3-5 結構分析 15 3-3-6 硬度實驗 15 3-3-7 附著性實驗 15 3-3-8 磨耗實驗 16 3-3-9 表面、斷面、磨痕分析 16 3-4 實驗設備清單 16 第四章 鍍層實驗結果與討論 18 4-1 各階段原始鍍膜之性質 18 4-1-1 鍍膜外觀 18 4-1-2 鍍膜晶體結構 18 4-1-3 鍍膜成分分析 19 4-1-4 鍍膜硬度 20 4-1-5 鍍膜表面與斷面 20 4-1-6 鍍膜附著性 21 4-1-7 鍍膜磨耗性質 21 4-1-8 小結 22 4-2 500℃熱處理對各階段鍍膜之影響 23 4-2-1 鍍膜晶體結構 23 4-2-2 鍍膜成分分析 23 4-2-3 鍍膜硬度 24 4-2-4 鍍膜表面與斷面 24 4-2-5 鍍膜附著性 25 4-2-6 鍍膜磨耗性質 25 4-2-7 小結 25 4-3 600℃熱處理對各階段鍍膜之影響 27 4-3-1鍍膜晶體結構 27 4-3-2 鍍膜成分分析 27 4-3-3 鍍膜硬度 27 4-3-4 鍍膜表面與斷面 27 4-3-5 鍍膜附著性 28 4-3-6 鍍膜磨耗性質 28 4-3-7 小結 29 第五章 結論與未來展望 30 5-1結論 30 5-2 未來展望 30 第六章 參考文獻 32 附錄 1 未經熱處理之鍍膜GDS分析圖 89 附錄 2 500℃熱處理後鍍膜GDS分析圖 93 附錄 3 600℃熱處理後鍍膜GDS分析圖 96 附錄 4 SRV磨痕深度 99

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