工具機之液靜壓迴轉台主要是透過靜壓油膜將其支承進行運動，故藉由油膜厚度的控制將可有效地提升工具機之液靜壓迴轉台工作精度，因此，本文為描述油膜厚度控制的改善於液靜壓迴轉台之研究，在研究中液靜壓迴轉台為整合液靜壓軸承及導軌最佳化設計、壓力補償及驅動系統控制等技術。首先在最佳化設計液靜壓軸承及導軌方面，本文藉由性能分析、油室組合及最佳化設計，研發具壓力均勻分佈之液靜壓導軌，再將其裝置於液靜壓迴轉台，藉此改善油膜厚度的變化。再者，使用比例壓力閥作為壓力補償元件，並搭配自調式模糊滑動模式控制器，達成油膜厚度控制之效能，於本研究稱之為閥控壓力補償裝置。在驅動系統方面，本文應用可變量液壓馬達以直接連接迴轉工作台的方式作為驅動系統，透過可變量液壓馬達具變扭矩定轉速之特性，使油膜厚度可藉由加入驅動系統的速度控制，協助閥控壓力補償裝置進行油膜厚度控制的改善。透過實驗以驗證具設計、壓力補償及速度控制之液靜壓迴轉台的可行性，由實驗結果可知，所提出的概念能顯著地達成工具機之液靜壓迴轉台油膜厚度控制。

Hydrostatic rotary table is supported by oil film between guideway and them. Besides, the precision of hydrostatic rotary table can be improved by oil film thickness control. Therefore, this paper presents the improvement of oil film thickness control in a hydrostatic rotary table. The hydrostatic rotary table combines the hydrostatic bearing, guideway, pressure compensation and drive system optimization and control technology in this study. For hydrostatic bearing and guideway optimization, this study developed a hydrostatic guideway with uniform pressure distribution by the performance analysis, chamber combination and optimal design. The proposed guideway was subsequently incorporated into a hydrostatic rotary machine. Hence, the oil film thickness is affected by the hydrostatic guideway optimization in the system. In addition, this study integrates the proportional relief valves to compensate the pressure with a self-tuning fuzzy sliding mode controller to control the oil film thickness, which is a pressure compensation device. For drive system, this study proposes a new system for a variable hydraulic motor to driven rotary table. According to the variable hydraulic motor with constant speed under the various loads, the oil film thickness can be controlled by the pressure control and the speed control. The experimental results show that its feasibility of the hydrostatic rotary machine with pressure control and speed control can be verified satisfactory.

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