自近代的工程研究發展起，裂縫在結構中的成長與破壞機制一直是重要的問題。在有限元素分析中，裂縫模擬的數值方法如虛擬裂紋閉合法、擴展型有限元素法等在破壞模擬上的發展與應用至今仍方興未艾。然而，在破壞模擬的研究上，利用有關數值方法進行的應用研究，常未考慮該方法之基本假設和限制範圍，而有預測失準的疑慮。本文對當今較普及的破壞數值工具在套裝軟體上的適用空間做深入的探討，分析其適用前提與基本假設後，幫助相關的應用研究能有更堅實的使用基礎。建立基本應用前提後，本文以現今新興科技中之工程問題：雷射加工劈裂超薄玻璃、薄膜結構之破裂與脫層、橡膠軸承之破壞與脫層作為應用研究模型，探討不同數值方法之表現，透過系統化研究各種具代表性的實例，找出其優缺點和最佳應用場合。除了拓展相關工具之應用空間，本文也對當代工程之破壞研究問題提出裂縫成長預測、機制解釋和詳盡的參數分析。其相關產出成果可對微系統工程的元件可靠度、製造方法等提出參數調整與設計準則之參考。

Numerical simulations of fracture mechanics can provide wide parametric studies and detailed explanations of fracture mechanisms. However, there are some limitations on these numerical tools in packaged software to cause poor accuracy of prediction. In this thesis, the performance and applicability of XFEM and VCCT are compared in basic benchmark and different practical engineering issues. A methodology of application of XFEM is established to improve the accuracy and reliability of research with packaged tools for fracture simulations. The performance of XFEM and VCCT in different application area is discussed to provide practical suggestions for real engineering problems. For the case studies in this thesis, the simulations and parametric analyses are performed to explain the mechanisms and improve performance of systems. The contributions of this thesis are to provide a stronger basis for the use of numerical packages and to extend the application area of the XFEM tools.

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