異質摻雜之氧化鋯與氧化鈰能有效的傳導氧離子，目前有相當多的研究在進行中。將這兩個材料應用於固態燃料電池中時，其厚度與陰極、陽極材料之接觸介面影響發電效率。於本研究中，多孔性的釤摻雜氧化鈰(SDC)與釔安定氧化鋯(YSZ)柱狀晶膜以電子束蒸鍍輔以斜角度沉積成長，再於其上成長La(Sr)MnO3-δ(LSM)、La(Sr)CoFeO3-δ(LSCF)與白金，以觀察並討論其表面形貌與三相界面對其高溫電性的影響。
研究的第一部分結果顯示，利用電子束蒸鍍法輔以斜角度沉積技術製備多孔柱狀晶質氧化鋯薄膜與LSM雙層膜，LSM需要進行900℃退火來形成結晶相。YSZ與LSM雙層膜於低溫的阻抗，遠低於LSM單層膜。
第二部份中，於多晶氧化鈰基板雙面上分別製備YSZ/Ni薄膜與SDC/LSCF。採用兩種方式於製作SDC之上的LSCF層，其一以傾斜基板垂線80o進行成長，不施加旋轉(Type-G)；另一方式不施加基板傾斜(Type-N)。於600℃，Type-G所獲功率密度為5.7 mWcm-2，約為Type-N之兩倍，是由於氧氣較易於Type-G之SDC/LSCF介面進行交換。
於第二部分中另外發現LSCF共析出兩個氧化物相，因此在第三部份中，以電子束蒸鍍厚度80~240 nm白金以取代LSCF層。240 nm 厚的白金層於900℃熱處理後，在700℃下產生20 mWcm-2的功率密度，80 nm白金層表面較為緻密，功率密度為4 mWcm-2。由此實驗證實了第二部分實驗中氣體交換對於功率有很大的影響。
於第二部分的實驗發現功率密度低於SDC為基板之理論值，於最後的工作中，SDC基板沉積YSZ緻密薄膜後進行1000℃之熱處理，於介面之TEM觀察中發現接近SDC基板之YSZ薄膜的部分之高解析影像中，111晶面距離增大為3.2Å。另外由EDS分析也發現大量鈰離子與釤離子擴散至YSZ薄膜中，導電率因此下降。

Yttrium doped porous zirconia film was deposited on 10 at.% samaria doped ceria by electron beam evaporator with assistance of glancing angle technique. La(Sr)MnO3-δ(LSM), La(Sr)CoFeO3-δ(LSCF) and Pt were deposited on it as upper layer to serve as cathode. In the first part, YSZ/LSM bilayer exhibits lower resistance than LSM single layer on thick YSZ plate below 700℃. For intermediate temperature use, SDC plate and LSCF replaced the YSZ plate and LSM, but the power performance was 5.7 mWcm-2 at 600℃. In the second part, the LSCF film deposited by E-beam required further heat treatment, and cobalt oxide formed. For further examining this design, the interface of YSZ/SDC after 1000℃ heat treatment was observed under TEM and EDS. In the final part, different thickness of Pt deposited on YSZ columns with YSZ single crystal substrate, and the obtained highest power density was 20 mWcm-2 at 600℃.

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