透過局部表面電漿共振所激發的光熱效應在光熱領域近年來因為其巨大的發展潛力受到許多關注與研究。未來若是可以利用更有效率的光熱轉換應用於太陽能轉換上的相關應用上，在能源短缺的未來絕對是有相當的前瞻性。但目前對於較寬頻的光源光熱轉換上的效率和大面積製造電漿子結構仍然是一個巨大的挑戰需要克服。在本研究中將提出一個具有多重尺度的電漿子奈米結構作為光熱基板，在此基板中利用許多半導體相關的微奈米製程技術，像是黃光微影、乾蝕刻、金屬輔助化學蝕刻等，將微米等級與奈米等級的結構進行結合。最後將氮化鈦濺鍍在這個多尺度結構上作為光輻射和熱能產生之間的介質。以上描述得多尺度的金屬奈米結構將在產生光熱效應中發揮關鍵作用。這種光熱效應特性可以通過局部表面電漿共振來增強使更多輻射能量轉變成熱能。改變不同的微米與奈米結構形貌來研究其光熱效應。在微米結構上設計了兩種側壁類型，分別是錐形(taper)與垂直(vertical)側壁，而在奈米結構上則是透過不同的金屬輔助化學蝕刻深度製作出多孔材質(porous texture)與凹槽(trench)型態。本研究所製作出的光熱基板最後也透過光譜儀與熱像儀量測其光學的反射率與熱量的溫度表現。從實驗量測結果可以得知具有多重尺度的電漿子結構具有較低的光學反射率和明顯的升溫表現。由此可知本研究的光熱基板確實有因為多重尺度的結構使光熱效應增加。特別是錐形側壁類型的微米結構搭配凹槽型態的奈米結構下的光熱基板從反射率與熱像儀看出有最佳的光熱效應。和氮化鈦薄膜相比，多重尺度電漿子結構的升溫表現是氮化鈦薄膜的3.6倍。因此未來可以透過改變微米與奈米結構以此找出最佳的設計，使光熱基板在寬頻光譜下具有高效率的光熱轉換。

Photothermal effect of material has attracted plenty of attention because of its versatile application. For example, solar energy can be well converted to the generation of heat for seawater desalination by excellent photothermal effect. However, the conversion efficiency is still a challenge for the broadband light source. In this study, the multi-scale plasmonic structures were proposed as a photothermal substrate, which integrated the microstructure with the nanostructure. The microstructure and nanostructure were obtained by Litho-etching and metal-assisted chemical etching technologies, respectively. The titanium nitride was deposited on this multi-scale structure as the mediator between the irradiation and generation of heat. The metallic nanostructure on the multi-scale structure will play a crucial role in generating thermoplasmonic effect. This thermoplasmonic property can be enhanced by the local surface plasmon resonance. Moreover, the type (vertical or taper shapes) of microstructure and morphology (porous texture or trench) of nanostructure also were altered to investigate the photothermal effect. The multi-scale plasmonic structures experimentally demonstrated that lower optical reflection can be converted to high photothermal efficiency as comparing the titanium nitride film. These engineering multi-scale structures appear a remarkable potential for use as a non-classical photothermal device.

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