台灣在TFT產業一直以來擁有外商獨佔技術的優先權，在市場需求持續強勁的增加之下，台灣不斷的擴廠提升產能，以期持續增加整個事業體的獲利。但隨著壟斷技術的限制被打開及面板市場價格的落底，台灣面板廠要生存就必需在品質上尋求穩定的完美，並降低成本擁有競爭優勢，才能在技術上與強國的產能抗衡。玻璃基板品質最重要的便是表面潔淨度而目前玻璃基板洗淨製程的補液參數，主要是依據工廠裝機時工程師的初步設定，但實際上有多個影響因子在整個補液系統中須被探討。
本研究採取實驗設計(DOE, Design of experiment)來探討相關因子的特性，使用DOE可同時改變多個自變數來規劃有系統的實驗，並由變異數分析找出影響濃度及其變異的顯著因子，評估主因子及水準範圍內所呈現的品質特性。此研究不但定義出洗淨製程的補液系統中定量幫浦及清洗槽的顯著重要因子，更降低了濃度變異及減少洗劑原液的耗用量，結果顯示洗劑原液使用量減少了40%，同時濃度變異也降低了56%，不只穩定了玻璃潔淨度的品質亦協助個案工廠達到製造成本的降低。

This study aims to identify the key factors to ensure the stability of the detergent concentration in the TFT-LCD substrate cleaning process. The 2k-p fractional factorial experiment is subsequently conducted to investigate the five factors, which are the pump frequency, pump stroke length and three timing points of providing detergent (T1, T2, and T3) in the substrate cleaning process. The ANOVA results show that the three factors are significant in controlling detergent concentration and concentration variation between the pump frequency and timing points of providing detergent in washer tanks 1 and 2. The results show that the pump frequency and timing points of providing detergent in washer tanks 1 and 2 in the low level would ensure the stability of the detergent concentration and the consumption amount would also decrease. The implications of the detergent concentration with pump and timing points of providing detergent in washer tanks are also discussed.

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