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研究生: 許軒榮
Hsu, Hsuan-Rong
論文名稱: CaZrO3和MnNb2O6摻雜對BaTiO3介電陶瓷還原氣氛燒結中氧空缺之生成及介電性能影響之研究
Effects of CaZrO3 and MnNb2O6 Doping on Oxygen Vacancy Formation and Dielectric Properties of BaTiO3 Dielectric Ceramics Sintered in a Reducing Atmosphere
指導教授: 向性一
Hsiang, Hsing-I
學位類別: 碩士
Master
系所名稱: 工學院 - 資源工程學系
Department of Resources Engineering
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 141
中文關鍵詞: BaTiO3還原氣氛摻雜CaZrO3MnNb2O6共摻雜熱激活去極化電流氧空缺抗還原
外文關鍵詞: BaTiO3, Reducing atmosphere, CaZrO3 doping, Co-doping with MnNb2O6, TSDC, Oxygen vacancies, Reduction resistance
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  • 本研究探討了,使用高還原焓之CaZrO3摻雜,和受體施體MnNb2O6共摻雜對BaTiO3介電陶瓷在還原氣氛燒結過程中,氧空缺生成及其介電性能的影響。透過一系列先進的表徵技術,包括X射線衍射、X射線光電子能譜、掃描電子顯微鏡、穿透式電子顯微鏡、高阻計以及電化學交流阻抗分析系統,探討摻雜不同濃度的CaZrO3和MnNb2O6,對還原氣氛(1%H₂/99%N₂)下燒結之BaTiO3陶瓷體結晶相,微結構及介電性質之影響。研究結果顯示,CaZrO3和MnNb2O6的摻雜,有效地抑制了氧空缺的生成,從而減少了電子導電率,同時也降低了介電損耗、增強絕緣電阻及降低了在高溫作用下之漏電流。並且保持優異的溫度穩定性,符合X7R規範的要求(在-55°C至125°C的廣泛溫度範圍內,電容變化率保持在±15%以內),改善了BaTiO3陶瓷的介電性能。由XPS分析結果顯示,CaZrO3和MnNb2O6的摻雜導致氧空缺和Ti3+ 濃度的顯著減少,高溫阻抗分析指出,在高溫下,晶粒與晶界的導電活化能顯著增加。此外透過熱激活去極化電流分析,我們觀察到在高溫下漏電流顯著的降低,進一步證實了CaZrO3和MnNb2O6摻雜可提升BaTiO3陶瓷在還原燒結氣氛下之抗還原能力。
    總體而言,本研究不僅深入揭示了CaZrO3和MnNb2O6摻雜,在提高還原氣氛下燒結BaTiO3陶瓷的介電性能與可靠性,為開發適用於先進電子應用中的高可靠性電容器材料提供了堅實的科學基礎。

    This study investigates the effects of doping BaTiO₃ dielectric ceramics with CaZrO₃ and MnNb₂O₆ during the sintering process in a reducing atmosphere. Advanced characterization techniques, including X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), transmission electron microscopy (TEM), high-resistance measurement, and electrochemical impedance spectroscopy (EIS), were employed to systematically analyze the impacts of varying concentrations of CaZrO₃ and MnNb₂O₆ on the crystalline phase, microstructure, and dielectric properties of BaTiO₃ ceramics sintered in a 1% H₂/99% N₂ reducing atmosphere.
    The results demonstrate that doping with CaZrO₃ and MnNb₂O₆ effectively suppresses the formation of oxygen vacancies, significantly reducing electronic conductivity, dielectric loss, and leakage current at high temperatures, while enhancing insulation resistance. The doped BaTiO₃ ceramics exhibit exceptional temperature stability, fully complying with the X7R specification, maintaining a capacitance variation within ±15% over a wide temperature range from -55°C to 125°C. The dielectric properties of BaTiO₃ ceramics are substantially improved by doping with CaZrO₃ and MnNb₂O₆, which markedly reduces the concentrations of oxygen vacancies and Ti³⁺ ions. Furthermore, the activation energy for conduction in both grains and grain boundaries increases significantly at high temperatures. The considerable reduction in high-temperature leakage current further confirms the enhanced reduction resistance of BaTiO₃ ceramics doped with CaZrO₃ and MnNb₂O₆ during the sintering process in a reducing atmosphere.

    摘要I 致謝XIV 目錄XVI 表目錄XX 圖目錄XXI 第一章 緒論 1 1-1前言1 1-2研究目的2 第二章文獻回顧與理論基礎3 2-1積層陶瓷電容器介紹3 2-2鈦酸鋇之晶體結構與性質4 2-3鈦酸鋇之介電性質7 2-4鈦酸鋇粉末尺寸與晶粒大小之影響9 2-5鋇鈦比 (A/B ratio) 對鈦酸鋇之影響12 2-5-1Ba-excess之影響12 2-5-2Ti-excess之影響13 2-6摻雜元素對鈦酸鋇之影響15 2-6-1摻雜離子置換原理15 2-6-2摻雜鋯酸鈣(CaZrO3)之影響 16 2-6-3受體施體共摻雜 (Acceptor-Donor Co-doping) 之影響20 2-6-4摻雜稀土元素之影響 21 2-7鈦酸鋇絕緣電阻降解機制23 2-8熱刺激去極化電流法26 2-9溫度穩定性30 第三章實驗方法與步驟33 3-1實驗流程 33 3-2起始原料粉末37 3-3燒結陶瓷材料分析37 3-3-1X光繞射分析37 3-3-2X光射線光電子能譜儀38 3-3-3晶體結構擬合精算分析38 3-3-4掃描式電子顯微鏡分析39 3-3-5穿透式電子顯微鏡分析39 3-3-6比表面積分析 39 3-3-7燒結陶瓷體密度量測 40 3-4燒結陶瓷體電性量測40 3-4-1介電常數與電容變化率40 3-4-2介電性質隨頻率變化之量測41 3-4-3絕緣電阻率之量測41 3-4-4交流阻抗分析 42 3-4-5熱刺激去極化電流量測42 第四章鋯酸鈣(CaZrO3)摻雜鈦酸鋇之結果與討論43 4-1陶瓷體分析43 4-1-1球磨粉末比表面積分析43 4-1-2燒結粉末結晶相鑑定分析44 4-1-3燒結粉末晶體結構擬合精算分析46 4-1-4燒結陶瓷體顯微結構分析48 4-1-5X光射線光電子能譜儀51 4-2電性量測55 4-2-1介電性質55 4-2-2頻率與介電性質之量測58 4-2-3溫度與介電性質之量測60 4-2-4阻抗分析Z'與Z''分析62 4-2-5頻率對Z'' 與 M''分析67 4-2-6交流導電率之分析69 4-2-7熱刺激去極化電流法 72 4-3穿透式電子顯微鏡分析74 第五章铌酸錳(MnNb2O6) 摻雜鈦酸鋇之結果與討論76 5-1铌酸錳(MnNb2O6)之合成76 5-2陶瓷體分析78 5-2-1球磨粉末比表面積分析78 5-2-2燒結粉末結晶相鑑定分析79 5-2-3煅燒粉末晶體結構擬合精算分析81 5-2-4燒結陶瓷體顯微結構分析83 5-2-5X光射線光電子能譜儀86 5-3電性量測90 5-3-1介電性質90 5-3-2頻率與介電性質之量測93 5-3-3溫度與介電性質之量測95 5-3-4阻抗分析Z'與Z''分析97 5-3-5頻率對Z''與M''分析101 5-3-6交流導電率之分析102 5-3-7熱刺激去極化電流法 105 5-4穿透式電子顯微鏡分析107 第六章結論109 參考文獻110

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