在本論文中，利用SOD技術製作出一個工作波段在1.55微米的矽基板光調變器及太陽能電池。
光調變器的調變機制為自由載子色散效應，並藉由電荷耦合器可以觀察到在不同的偏壓下，光訊號在通道中的變化，且在不同的調變長度與寬度下，調變深度均可以達到100%。
太陽能電池的製作以一次擴散來完成n+-p--p+結構，並研究不同的製程來達到轉換效率的最佳化；另外，設計其光學薄膜來降低反射。最後，轉換效率可以達到9.85%，而fill factor、Jsc及Voc分別為59%、31.917mA/cm2、519.922mV。除此之外，透明導電膜AZO及矽薄膜成長也將會被討論分析及製作。

In this thesis, the Si-based infrared optical modulators working at the wavelength of 1.55 m and solar cells have been fabricated by SOD technique. For optical modulators, their optical modulation mechanism is based on the free carrier dispersion effect, which is verified by the CCD images showing the guided light within the channel is being modified with respect to different bias voltages. Their modulation depths of modulators with varieties of modulation lengths and widths achieved are close to 100% when appropriate voltages are administered.
As for the solar cells, the n+-p--p+ structure is formed by one drive-in step using the aforementioned SOD method. The optimized processes being implemented for the improvement of the solar cell’s conversion efficiency are investigated, which also include the use of the optical thin films deposited on the cells to reduce the reflection. Finally, the best conversion efficiency, open-circuit voltage (Voc), short-circuit current (Isc) and fill factor of these solar cells achieved are 9.85%, 519.922mV, 31.917mA/cm2, and 59%, respectively.

[1] N. N. Toan, Spin-on glass materials and applications in advanced IC technologies, University Twente, 1999.

[2] R. A. Soref, “Silicon-based optoelectronics,” Proc. IEEE, vol. 81, pp. 1687–1706, 1993.

[3] Computer Networks, 3rd ed. by Andrew S. Tanenbaum, © 1996 Prentice Hall, and P. Kaiser, “Vibrational mode assignments,” Appl. Phys. Lett., vol.23, pp.45, 1973.

[4] Sciuto, S. Libertino, S. Coffa, and G. Coppola, “A miniaturizable Si-based electro-optical modulator working at 1.5μm,” Appl. Phys. Lett., vol.86, pp.201115-201115-3, 2005.

[5] 楊昌中, 能源領域中的奈米科技研究, 工業研究院 能源與環境 研究所, 中華民國95年12月26日。

[6]http://inventors.about.com/od/timelines/a/Photovoltaics.htm

[7] A. C. Pan, C. del Canizo and A. Luque, “Effect of thickness on bifacial silicon solar cells,” IEEE Electron Devices, Spanish Conference on, pp.234-237, Jan. 31 2007 - Feb. 2 2007.

[8] Guy Beaucarne, Advances in OptoElectronics, volume 2007, Article
ID 36970.

[9] W. Fuhs , S. Gall, B. Rau, M. Schmidt, J. Schneider, “A novel route to a polycrystalline silicon thin-film solar cell,” Solar Energy, vol.77, pp.961-968, 2004.

[10] O. Kluth, B. Rech, L. Houbena, S. Wieder, G. Schope, C. Beneking, H. Wagner, A. Loffl and H.W. Schock,“Texture etched ZnO:Al coated glass substrates for silicon based thin film solar cells,” Thin Solid Films, vol.351, pp.247-253, 1999.

[11] M.A. Martinez, J. Herrero and M.T. Gutierrez, “Deposition of transparent and conductive Al-doped ZnO thin film for photovoltaic solar cells,” Sol. Energy Mater. Sol. Cells, vol.45, pp.75-86, 1997.
[12] H. Kim, A. Pique, J.S. Horwitz, H. Murata, Z.H. Kafafi, C.M. Gilmore and D.B. Chrisey, “Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices,” Thin Solid Films, vol.377-378, pp.798-802, 2000.
[13] Z.A. Ansari, R.N. Karekar and R.C. Aiyer, “Humidity sensor using planar optical waveguides with claddings of various oxide materials,” Thin Solid Films, vol.305, pp.330-335, 1997.

[14] T. Minami, H. Sato, H. Imamoto and S. Takata, “Substrate temperature dependence of transparent conducting Al-doped ZnO thin films prepared by magnetron sputtering,” Jan. J. Appl. Phys., vol.31, pp. L257-L260, 1992.

[15] A. E. Rakhshani, Y.Makdisi, H. A. Ramazaniyan, “Electronic and optical properties of fluorine-doped tin oxide films,” Journal of Applied Physics, vol.83, pp.1049-1057, 1998.

[16] T. S. Moss, G. J. Burrell, and B. Ellis, Semiconductor Opto-Electronics, London, England: Butterworth & Co., 1973.

[17] R. A. Soref, R. R. Bennett, “Electrooptical effects in Silicon,” IEEE Journal of Quanum Electronics, vol. 23, no. 1, pp. 123-129, 1987.

[18] Antonella Sciuto, Sebania Libertino, Salvo Coffa, and Giuseppe Coppola, “ Design, Fabrication, and Testing of an Integrated Si-Based Light Modulator, ” J. Lightwave Technol., vol. 21, no. 1, pp. 228-235, 2003.

[19] S. O. Kasap, Optoelectronics and photonics: principles and practices, Pearson Education, 2001, pp. 254-255.

[20] S. O. Kasap, Optoelectronics and photonics: principles and practices, Pearson Education, 2001, pp. 257-258.
[21] 文/蔡進譯，「超高效率太陽能電池-從愛因斯坦的光電效應談起」，物理雙月刊 (二十七卷五期) ; 2005年10月，pp. 701-719。

[22] 莊嘉琛，「太陽能工程–太陽能電池篇」，全華科技圖書股份有限公司；92年3月。

[23] http://pvcdrom.pveducation.org/

[24] 李正中，「薄膜光學與鍍膜技術」，藝軒圖書出版社；1999年12月第一版，pp. 42-43。

[25] A. Sciuto, S. Libertino, S. Coffa, “Design, fabrication and testing of an integrated Si-based light modulator,” Proc. SPIE vol. 4947, pp. 74-83, 2003.

[26] H. L. Hartnagel, A. K. Jagadish, “Semiconducting Transparent Thin Films,” published by Institute of Physics Publishing, 1995.

[27] J. D. Ye, S. Gu, S. Zhu, T. Chen, W. Liu, F. Qin, L. Hu, R. Zhang, Y. Shi, and Y. Zheng, “Raman and photoluminescence of ZnO films deposited on Si (111) using low-pressure metalorganic chemical vapor deposition,” J. Vac. Sci. Technol., vol.21, pp.979-982, 2003.

[28] Eugene Hecht. , Optics, Addison Wesley, c2002, 4th ed., pp. 426-430.

[29] Ricky W. Chuang, Zhen-Liang Liao, Chih-Kai Chang, “Integrated Optical Beam Splitters Employing Symmetric Mode Mixing in SiO2/SiON/SiO2 Multimode Interference Waveguides,” Japanese Journal of Applied Physics Vol. 46, No. 4B, pp. 2440–2444, 2007.