本實驗使用電化學沉積法(Electrochemical depotion)製作氧化鋅摻雜銻之奈米柱。在實驗初段利用循環伏安法確認沉積電位大致上之範圍，並固定溫度下，探討了沉積電壓與pH值等參數，對奈米柱外表形貌和銻摻雜量之影響，包刮外表形貌、銻摻雜量、晶格結構等，以量化成長氧化鋅摻雜銻之最佳條件；隨後以奈米柱所製作之奈米柱場效元件(Nanowire field emission transistor)量測奈米柱之電性輸出特性與電性轉換特性，以確認利用電化學沉積成功的製作出p型氧化鋅摻雜銻之奈米柱，並最後對ZnO:Sb奈米柱進行XPS分析，確認造成氧化鋅摻雜銻之原因為何。
研究結果分析可知，由循環伏安法抓出沉積電壓應控制於 -0.9V以下，並由改變電壓參數之實驗，在經由SEM、XRD與EDS分析可知，成長過程中Sb會以金屬態沉積，需經由退火步驟方可消除；而在沉積電壓為 -0.8V時，ZnO:Sb奈米柱能夠形成纖鋅礦結構之六面體；最後經由EDS分析可知，銻摻雜量會隨著沉積電壓上升而下降；而最佳的成長電壓介於-0.81V至
-0.83V之間。而由調變pH值參數實驗可知，奈米柱外表形貌於pH:4.52-5.84為佳，摻雜量於pH:4.95-5.46最多，約為Sb:1.5至2.0(at%)。並由上述條件下之成長參數，成長ZnO:Sb奈米柱樣品，製成FET後量測IV curve；由電性轉換特性和電性輸出特性曲線皆顯示，ZnO:Sb奈米柱呈現p-type之特性。最後XPS譜圖分析可知，樣品中的Sb 3d3/2 peak位於539.7 eV，表示了ZnO:Sb奈米柱中的Sb取代了Zn的位置，並與氧產生鍵結。
由上述分析之結果，確定了利用電化學沉積法能夠成功的製作出氧化鋅摻雜銻之奈米柱。

ZnO:Sb nanowires arrays were fabricated using electrochemical solution method. The cyclic voltammetry was performed to determine the suitable deposition potential range. The influences of deposition potential and pH value on the morphology, composition, Conduction characteristics and crystalline quality of ZnO:Sb nanowire were studied. The ZnO:Sb nanowire were measured by Nanowire field emission transistor(NWFET).XPS show that which reason bring about ZnO:Sb nanowires p-type.
The research indicates that （1）the deposition voltage, Above -0.8V, the Sb become metal; below -0.8V, the shape of ZnO NWs can not be ideal hexagonal（2）at the annealing temperature of 500℃, Sb metal can be removed（3）the shape of ZnO NWs is more stable with pH value 4.52-5.84 and high Sb doping content in ZnO NWs with the pH value 4.95-5.46.（4）the Sb Atomic percent in ZnO:Sb nanowires is about 1.5-2.0 percent.
The IV curve of ZnO:Sb nanowire was measured by device of NWFET. the electrical characteristics and transfer characteristics indicate that the NWs has
p-type characteristics and the hole concentration is about 1017cm-3. The XPS spectra show the Sb 3d3/2 peak, indicating that Sb has been doped into the ZnO NWs and that Sb substitute Zn atom.
Electrodeposition is a easy and economic method for fabricating p-type ZnO:Sb NWs.

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