| 研究生: |
郭福升 Kuo, Fu-Sheng |
|---|---|
| 論文名稱: |
大面積常壓電漿技術之研究 Development of Large-Area Atmospheric Plasma Technology |
| 指導教授: |
孫亦文
Sun, I-Wen 洪昭南 Hong, Chau-Nan |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 化學系碩士在職專班 Department of Chemistry (on the job class) |
| 論文出版年: | 2003 |
| 畢業學年度: | 91 |
| 語文別: | 中文 |
| 論文頁數: | 112 |
| 中文關鍵詞: | 常壓電漿 |
| 外文關鍵詞: | atmospheric pressure plasma |
| 相關次數: | 點閱:69 下載:5 |
| 分享至: |
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電漿由於本身具有高位能和低動能,因此許多高溫下才能達到的反應皆可於常溫下藉由電漿完成,此種優良特性將保護材料的整體性質不受高溫破壞,除此之外亦可大量節省高溫所需之能源。在本研究中所發展的低溫常壓電漿除具備低溫電漿的特點之外,尚具有不需配備昂貴的真空設備以及省卻了等候抽氣時間的優點,因此可增加處理速率,且不會產生二次污染。基於種種優點,低溫常壓電漿之應用將越來越廣。
由於常壓電漿受限於電漿均勻度以及大面積尺寸,促使許多研究者投入常壓電漿電極之開發與設計。本研究以兩個主軸為主:(1)電極設計(2)對所設計之電極在聚亞醯胺(polyimide,PI)進行表面處理之測試。
分析主要是從三方向進行評估:電極實際處理效果評估、基材處理前後之表面型態分析、處理前後之bulk性質比較,分別是以水滴接觸角(contact angle)、電子顯微鏡(SEM)、掃描探針顯微鏡(SPM)、X光電子光譜(XPS)、傅立葉紅外光譜(FT-IR)來測試。
綜合評估後,所設計之新電極具有便利性、耐久性、均勻性、大面積處理、實用性等特色。聚亞醯胺表面在電漿處理後鍵定確認,表面能已經明顯提高並且不損及聚亞醯胺之整體性質
Low-temperature atmospheric plasma technology has been developed in this study. Low temperature(or cold)plasma exhibits many unique properties like extremely high reactivities, near room temperature process, energy-saving and environmental-friendly features, etc. Besides, atmospheric plasma does not require expensive vacuum apparatus and is suitable for continuous operations. Therefore, atmospheric cold plasma is economic, efficient and suitable for mass production embodying great potentials for industrial applications.
However, atmospheric cold plasma suffers from the problems like inhomogeneous discharges, difficulty to scale up, etc. Various designs of atmospheric plasma electrodes have been studied by many research groups. A new electrode design is proposed and its efficiency in cleaning polyimide surface has been studied.
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