單晶片整合之感測器節點將扮演下一代無線感測器網路應用之關鍵，其節點之系統設計中，小尺寸、長壽命、並可提供足夠功率的能源器最為關鍵，傳統蓄電池在如此嚴苛的設計條件下已不敷使用。微型能源採集器可轉換週遭環境之能源為可供網路節點所用之電能，並且不受使用壽命的限制，提供無線感測器節點之能源器可靠之解決方案。現今之網路節點包含計算與訊號處理等等之積體電路皆由先進之金氧半導體製程所實現，然而各種微型能源採集器近來雖已有許多研究成果，其設計與製程整合於先進金氧半導體製程之研究卻尚未被深入研究與實現。本論文提出可整合於金氧半導體製程之新式能源轉換器，以有效轉換廣泛散佈於環境中之熱能與振動供感測器節點所用。熱能轉換方面，本論文提出多層設計以及量子井結構之微型熱電轉換器，從元件構造以及材料熱電特性方面提升轉換器之輸出功率，並成功以金氧半導體製程實現，其元件之功率係數分別為0.0427 µW/cm2K2 和0.2510 µW/cm2K2，電壓係數分別為 3.417 V/cm2K和10.042 V/cm2K。振動轉換方面，本論文提出微型振動能源採集器之新式設計與製程，其元件可共振於大部分應用之低頻振動下以達到最大之輸出功率，並成功以金氧半導體製程相容製程實現，其元件在小面積9 mm2內具有改進之質量塊4.85 mg，可實現共振頻率105 Hz以及輸出功率0.0924 μW。本論文提出之新式能源轉換器相較於文獻結果具備高功率、高電壓、以及先進金氧半導體製程之整合性，將可應用於未來單晶片整合之無線感測器網路節點。

This work presents novel CMOS compatible energy harvesters for harvesting mechanical vibration and thermal gradient. Multilayered and quantum-well micro thermoelectric generators (ML-μTEG and QW-μTEG) are proposed for improving output power. Analyses show that the power and voltage factors can be improved by stacking multilayered thermolegs and adapting low-dimensional thermoelectric materials of μTEGs. The measured results demonstrate significant improvements of power factor 0.0427 µW/cm2K2 and voltage factor 3.417 V/cm2K for ML-TEG, and power factor 0.2510 µW/cm2K2 and voltage factor 10.042 V/cm2K for QW-TEG. Novel low-frequency resonant micro electrostatic generators (LR-μESG) are also proposed to harvest vibration at desired low frequency suitable for most applications. The proposed LR-μESG resonates at 105 Hz features a compact area of 9 mm2 with 4.85 mg proof mass, which converts 0.88 nJ per charge-constraint cycle and accordingly output power of 0.0924 μW. The proposed harvesters are successfully implemented to demonstrate CMOS compatibility for autonomous sensor nodes.

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