本論文利用準分子雷射加工技術製作無接縫之微米級滾筒模仁，發展出準分子雷射直寫於曲面上定義高複雜度圖型之技術，並透過雷射能量自動量測系統與徑向補償系統增加加工效率與準確性。
在滾筒之準分子雷射直寫技術實驗中，我們是以KrF準分子雷射(波長248 nm，脈衝時間25 ns)作為光源。先利用本文發展出的滾筒之金屬蒸鍍技術在滾筒曲面均勻的蒸鍍上鉻 (50 nm)與金 (100 nm)。接著將雷射照射於滾筒之金屬層上，瞬間產生的高溫將金屬層移除，進行圖型定義；本文中滾筒雷射加工最小線寬可達20 μm。定義圖型後對玻璃或石英滾筒進行二氧化矽緩衝溶液 (Buffer Oxide Etch, BOE) 濕式蝕刻，此時金屬層為蝕刻阻擋層，蝕刻後即製作出微米級無接縫的滾筒模仁。
雷射加工採用光罩與滾筒近接的方式進行，滾筒上以1 : 1重現光罩定義的圖型，並應用數位影像處理概念使滾筒雷射直寫系統可進行高複雜度圖型數位化之滾筒加工。此外，本文開發準分子雷射能量分布自動量測系統，使設計光罩更有效率進而提升加工速率。並建立徑向補償系統目的降低滾筒旋轉時產生徑向偏差量至 ±5 μm以內，以增加雷射直寫技術的準確性。期望以本論文開發的具微米特徵之無接縫滾筒可應用於背光模組中元件之製作，並可實現連續式滾輪壓印技術。

This thesis investigates the fabrication processes of a seamless roller mold with micrometer-scaled features using laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller’s surface. Wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds with micrometer-scaled features. Digital image processing techniques are incorporated into the laser machining process so that complicated patterns can be successfully transferred. An automatic laser energy distribution system is constructed to increase the fabrication speed by making the best use of laser intensity profile. To deal with the geometrical and dimensional inaccuracy of the roller, an automatic position compensation system is integrated with the laser machining system.
In this study, a KrF pulsed excimer laser (248 nm wavelength and 25 ns pulse duration) is used as the laser machining source. The thin-film coating on a glass roller is achieved by modifying a commercial electron beam evaporating system. A roller mold laser-patterning platform which consists of the excimer laser, motorized linear translation stage and rotating table, and a multi-axis servo-controller is constricted and controlled by a personal computer. The smallest line width of the laser fabrication this system is about 20 μm. The speed of laser machining can be significantly increased with an automatic laser energy distribution system. The compensation system can significantly reduce the position error during the rotation of the roller down to ±5 μm. Finally, after the wet etching process of a glass roller in Buffer Oxide Etch (BOE) solution, a roller mold with seamless micro-structures is obtained. The proposed roller fabrication method can be applied to roller imprinting which can realize continuous fabrication of micro-structures at high speed and low cost.

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