本論文採用離子交換法成功的去製作出可靠度高且造價低廉的光波導元件。而且我們使用的是玻璃基版N-BK7，之後再搭配光學量測來了解其特性與效能。
首先是製作出掩埋式通道波導，經由特殊載具及電場的輔助下，成功的將波導掩埋進玻璃表面接近10μm。而接著是成功製作出特殊結構的1x2 MMI，製作的方式是用熔融鹽濕式離子交換法，溶液配方為AgNO3 : NaNO3= 0.02:1。而此種特殊結構稱為cascade，相較於傳統結構original來說，其最大特點便是能夠在相同的輸出間距下，縮短整體元件的長度，最多可達50%，在現在講求積體化的時代是非常引人興趣的。
最終用此兩種1x2 MMI結構去製作MMI-MZI的調變器，運用此種結構擁有較短的元件長度，製作相同總長的元件下，cascade會有較長的調變區，在評估調變器效能式子Vπ×L下，cascade會有較低的調變電壓輸出，可以達到低消耗功率的目的。而之後我們有做光場與光功率的量測，由光場圖發現元件皆有衰減到光完全消失的情況，證明確實有調變效果。而在電性的分析上由公式推導出施加電壓相對電極阻值即電極溫度的關係式，可以了解施加電壓後電極所消耗的功率。在比較後可發現cascade比original特性更好，證明此種結構擁有更好的效能。而光功率的量測則發現功率經調變後都有下降到0的趨勢，這是我們所預期的。而我們製作的元件幾乎都可達到20dB的衰減幅度，其中最多可達31dB，故可以用來當作不錯的衰減器。
此種運用MMI結構製作的MZI調變器取代傳統的Y型調變器除了可以縮小元件體積來符合積體化外，還有重要原因便是MMI的製程上跟光學表現上的特性優於Y型分光器，最主要是沒有彎曲損耗，一般預料整體損耗會比Y型分光器製作的調變器要低。之後我們將繼續改善此元件的特性，希望可以達到真正低損耗、高效能的調變器。

In this master thesis, we have successfully fabricated reproducible and low-cost optical waveguide devices in glass such as N-BK7 by ion-exchange technique. The concept of implementing buried waveguides as components of integrated optics devices is first pursued with a goal of minimizing the propagation loss. The entire process is assisted by applying the electric field to bury the waveguides 10μm into the glass substrate. Afterward, novel 1x2 MMI devices by cascading a multiple number of MMI stages are designed and built via the molten salt ion-exchange method. The composition of the melt solution is made up of AgNO3 and NaNO3 with the ratio of 0.02 to 1. One of the most important reasons to adopt the cascade structure is that the overall MMI length (L) of cascade structure could be made shorter compared to the conventional 1 x 2 MMI, with an extent of 50% shorter.
Finally, two different designs of MMI waveguides are incorporated as components of the MMI-based Mach-Zehnder interferometer (MZI) modulators. Our measurement result will show that the MMI-MZI modulators with cascaded MMI stages do have lower modulation voltages or Vπ×L; one of key figures of merit demonstrating the fabricated devices with comparably lower power consumption. Furthermore, the cascaded structure also has better electric characteristic compared to that of the original structure. Based on the measurement results obtained, the normalized optical power decays down to 0 once the Vπ is attained, which could be predicted beforehand by simulation. In addition, the original and cascaded MMI-MZI structures both deliver power attenuation close to 20dB. Among the devices studied, the highest attenuation could reach up to 31dB, which is highly beneficial for their functional role as variable attenuators. 

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