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研究生: 王聖齊
Wang, Sheng-Chi
論文名稱: 適用於建構健康基底預測保養模型之自動化健康樣本挑選機制
Automatic Baseline-Sample-Selection Scheme for Building BPM Models
指導教授: 鄭芳田
Cheng, Fan-Tien
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 製造資訊與系統研究所
Institute of Manufacturing Information and Systems
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 43
中文關鍵詞: 與健康基底比較之預測保養建模樣本自動化挑選機制虛擬量測
外文關鍵詞: Baseline predictive maintenance (BPM), automatic baseline-sample-selection (ABSS) scheme, virtual metrology (VM)
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  • VM-based Baseline-Predictive-Maintenance (BPM) Scheme已在近期被提出,其可達成機台設備零件之錯誤診斷及剩餘壽命之預測;而且其無需龐大歷史失效紀錄資訊的特性,使得BPM在預防保養後將有機會達成自動化模型建構之目的,進而讓BPM更適用於產線上。本論文之目的為開發Automatic Baseline-Sample-Selection (ABSS) Scheme,自動地選取BPM Scheme所需之建模樣本。在歷史資料可收集到的情形下,ABSS Scheme採用了healthy-samples-selection (HSS) 和dynamic-moving-window (DMW) 等方法來自動地挑選精簡且健康之歷史樣本 (concise-and-healthy samples, C&H samples)。而在歷史資料無法收集到的情形下,ABSS Scheme採用了standard-deviation-determination (SDD) 方法來解決新鮮穩定之少量建模樣本所導致的模型過於敏感的問題。ABSS Scheme也應用了殘差分析與假設檢定等方法來濾除模型內之矛盾樣本 (contradictory samples),因為此類樣本將對BPM的結果產生負面影響。最後經由實驗驗證可得知,ABSS Scheme可決定合適的BPM建模樣本,進而達成自動化模型建構之目的。

    The baseline-predictive-maintenance (BPM) scheme based on virtual-metrology technology was proposed recently. By applying the BPM scheme, fault diagnosis and prognosis can be accomplished and the requirement of massive historical failure data can also be released. Due to the merit of not requiring historical failure data, automatic creation of a BPM model just after maintenance becomes possible. This makes the BPM scheme more applicable for on-line implementation. The purpose of this paper is to develop an automatic baseline-sample-selection (ABSS) scheme to automatically prepare the modeling samples for creating the BPM model. The so-called healthy-samples-selection (HSS) and dynamic-moving-window (DMW) methods are adopted in the ABSS scheme to automatically select the historical concise-and-healthy (C&H) samples when historical data are available. If historical data are unavailable, an ad hoc z-score standard-deviation-determination (SDD) method of fresh modeling samples is applied in the ABSS scheme to remedy the problem of overestimating the rarity of the small amount of fresh modeling samples. Residual analysis and hypothesis testing are also applied in the ABSS scheme for deleting contradictory samples, which may deteriorate the BPM results. Experimental results show that the ABSS scheme can prepare proper modeling samples such that automatic model creation for BPM can be accomplished.

    中文摘要 英文摘要 誌謝 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機與目的 6 1.3 論文架構 7 第二章 BPM架構簡介與文獻探討 8 2.1 BPM架構簡介 8 2.2 文獻探討 9 第三章 研發適用於建構健康基底預測保養模型之自動化健康樣本挑選機制 11 3.1 理論基礎 11 3.1.1 資料品質評估機制 11 3.1.2 動態移動視窗機制 12 3.1.3 正規化 15 3.1.4 Six Sigma之品質管理方法 15 3.1.5 學生化刪除型殘差 17 3.1.6 假設檢定 18 3.2 ABSS機制介紹 19 3.2.1 Healthy-Samples-Selection (HSS) Method 21 3.2.2 Standard-Deviation-Determination (SDD) Method 24 3.2.3 利用Residual Analysis與Hypothesis Testing來剔除BPM初始建模樣本中之矛盾樣本 (contradictory samples) 26 第四章 以PECVD機台進行ABSS機制之實現與驗證 29 4.1 矛盾樣本對於BPM預測模型之影響 29 4.2 ABSS機制對於BPM之實際效益驗證 (歷史資料可利用) 33 4.3 ABSS機制對於BPM之實際效益驗證 (歷史資料無法利用) 35 第五章 結論 40 5.1 總結 40 5.2 未來研究 40 參考文獻 41

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