本研究使用非平衡磁控濺鍍法披覆氮化鈦(TiN)於AISI 316L和Ti6Al4V 以及氮化熱處理後的 AISI 316L 和 Ti6Al4V。實驗中有九種不同的下試件，316L系列中五種分別為 316L(316)、離子氮化後的316L(N316)與披覆氮化鈦於前兩者(TiN-316、TiN-N316)、將離子氮化N316降低粗糙度至原材再披覆氮化鈦(TiN-N316s)；Ti6Al4V系列四種分別為Ti6Al4V、經高溫氮化處理後的Ti6Al4V(N-Ti6Al4V)以及將前兩者披覆氮化鈦(TiN-Ti6Al4V、TiN-N-Ti6Al4V)。分析所有試片之微結構、機械性質，並以往復式磨耗試驗機在0.9 wt.% NaCl溶液中進行磨耗試驗，使用316L球、Ti6Al4V球與Si3N4球三種上試件，研究其磨潤特性與磨耗機構；電化學分析評估各種試片之抗腐蝕能力；培養Raw264.7小鼠單核巨噬細胞於所有試片上，探討生物相容性。
表面氮化與被覆上TiN膜能夠提升抗磨耗性質、抗腐蝕性與生物相容性。在316L系列中由TiN-N316s擁有最佳抗磨耗性與抗腐蝕性。在Ti6Al4V系列中TiN-N-Ti6Al4V擁有最佳之抗磨耗性， Ti6Al4V系列皆表現優異抗腐性。鍍上TiN膜之試片皆表現出良好的生物相容性。

The nitriding treatment and TiN coatings are used for the AISI 316L stainless steel and Ti6Al4V alloy. The low temperature plasma nitriding (390°C) was applied to AISI 316L stainless steel; The high temperature nitriding(900°C) was applied to Ti6Al4V alloy. TiN coatings were prepared on unnitrided samples and nitrided samples by Closed Field Unbalanced Magnetron Sputtering (CFUMBS). The microstructure, adhesion and hardness of the TiN coatings are examined using X-ray diffraction, scratch tester and nanoindenter, respectively. The wear tests were performed by SRV tester in 0.9% NaCl solution at load of 10N for 24 min as sliding 316L, Si3N4 and Ti6Al4V balls. The corrosion resistance of all samples was evaluated by potentiodynamic polarization test. The Purified mouse leukaemic monocyte macrophage cells (Raw 264.7) are seeded on the samples for 24h, 72h and 120h to investigate the biocompatibility. The result shows the duplex surface treatment significantly improved the wear, corrosion resistance and biocompatibility.

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