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研究生： 陳石育
Chen, Shi-Yu
論文名稱： N型有機場效電晶體之高分子閘介電層研究
The study of Polymer Gate Dielectrics on N-type Organic Field-Effect Transistor
指導教授： 郭宗枋
Guo, Tzung-Fang
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程研究所
Institute of Electro-Optical Science and Engineering
論文出版年： 2007
畢業學年度： 95
語文別： 中文
論文頁數： 113
中文關鍵詞： 有機場效電晶體
外文關鍵詞： OFET
相關次數： 點閱：96  下載：5 
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    • 隨著有機導電性高分子材料的電子元件迅速發展，有機材料應用在光電產品也越來越廣，原因在於有機材料可以有製程簡單、製作成本低、更輕、更薄，尤其是可以撓曲(flexible)的特性。近年研發快速的OLEDs/OLED display進入日常生活中的商品、乃至於軟性電子元件（e-paper, e-book）、ORFID的設計都是運用了有機材料的優勢，以符合日新月異的電子商品演變。而有機場效電晶體(有機薄膜電晶體)是產品設計的關鍵所在，和目前主流的金屬氧化物半導體電晶體最大不同處，在於採用有機半導體材料取代無機矽與其氧化物半導體材料。
    目前在有機場效電晶體裡，大多是電洞為主的元件(P型)，因為電子易受環境水氧等因素影響，在N型方面發展速度相當有限。本論文主要是探討不同介電層對Pentacene (五環素)元件的電性影響，並且配合原子力顯微鏡(AFM) 與X射線繞射(XRD)量測，觀察Pentacene結晶成長情形。而在本實驗中也發現Pentacene也是有N型產生，其電子移動率(Mobility)約是0.03 cm2V-1s-1，On/Off ratio約 10^4。

    Based on the earlier research, in the present study, the gate dielectric is an important criterion in the fabrication of organic field-effect transistors (OFETs). We have fabricated pentacene organic field-effect transistors with spin-coated polymer gate dielectric layers. Most of the report about pentacene are usually using in the P-type organic field-effect transistors. In our work, incorporating a poly(vinyl alcohol) polymer interfacial film and another cross-linked poly(4-vinyl phenol) layer as a double-layer gate dielectric causes the pentacene-based OFETs to exhibit effective n-channel conduction of a saturated, apparent pinch-off drain-source current with the electron mobility of 0.03 cm2V-1s-1.

    中文摘要.......................................I Abstract......................................II 誌謝......................................III 目錄.........................................IV 圖目錄.......................................VI 表目錄.......................................XI 第一章 緒論....................................1 1-1 有機場效電晶體發展........................1 1-2 研究動機與大綱.............................4 1-2-1 研究動機.............................4 1-2-2 論文架構.............................6 第二章 有機場效電晶體簡介.....................12 2-1 有機場效電晶體材料簡介.....................12 2-2 有機半導體傳導機制.........................14 2-2-1 能帶分析.............................14 2-2-2 導電機制.............................15 2-2-3 傳導方式.............................16 2-3 有機場效電晶體...........................18 2-3-1 元件結構.............................18 2-3-2 操作原理.............................18 2-3-3 相關參數.............................20 第三章 元件製作與實驗步驟.....................31 3-1 前言.....................................31 3-2 實驗元件製作..............................32 3-2-1 ITO基板的閘極圖案化...............33 3-2-2 閘極介電層的製作...................35 3-2-3 真空熱蒸鍍有機半導體層..............36 3-2-4 源極與汲極電極製作..................37 3-2-5 元件之量測..........................37 第四章 實驗結果與討論.......................43 4-1 Pentacene N-type元件.......................43 4-1-1 前言..............................43 4-1-2 單層介電層..........................44 4-1-3 PVA系列介電層......................48 4-2 Pentacene雙層介電層元件..................61 4-2-1雙層介電層的影響.....................61 4-2-2 Pentacene on ITO.....................61 4-2-3 Pentacene on Si基板..................64 4-3 C60元件特性討論..........................78 4-3-1 C60 on ITO...........................78 4-3-2 C60 on Si 基板.........................80 4-4 AFM與XRD分析............................91 4-5 C-V分析與結果討論..........................97 第五章 結論與未來研究建議....................106 參考文獻.....................................108

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