| 研究生: |
林志勇 Lin, Chih-Yung |
|---|---|
| 論文名稱: |
交流式靜電消除器之實驗研究 Experimental Study of AC Ionizer |
| 指導教授: |
周榮華
Chou, Jung-Hua |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 工程科學系碩士在職專班 Department of Engineering Science (on the job class) |
| 論文出版年: | 2004 |
| 畢業學年度: | 92 |
| 語文別: | 中文 |
| 論文頁數: | 71 |
| 中文關鍵詞: | 放電針 、多目標規劃法 、靜電消除器 |
| 外文關鍵詞: | Emitter, multi-objective optimization, Ionizer |
| 相關次數: | 點閱:81 下載:3 |
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靜電放電防制在電子產品良率及可靠度上扮演相當重要的角色,其中最重要的便是靜電消除器的使用。在靜電消除器相關的研究上,一般工業界使用都是以各廠商提供的資料及試誤所得的經驗法則,缺乏有系統的實驗研究且更無法探討參數間交互作用的影響。
本論文主要是以多目標規劃法(Multi-Objective Programming, MOP )來建立一個交流電暈放電型靜電消除器的多目標模型,期望能提供使用者應用或分析研究交流電暈放電型靜電消除器的參考工具,而不再以經驗法則去調整靜電消除器或是花費高昂的成本但卻成效不大的資源浪費。但若電極的材料或形狀不同,則需對新的靜電消除器重新建立新的模型。
另經由實驗發現在放電針材質與氣體種類的選擇上,以火花電壓高的為較佳選擇。放電針角度及尖端半徑雖越小越好,且尖端半徑隨使用時間有逐漸崩毀而導致除電效能衰退狀況。氣體供給壓力越大,帶動離子的風速越大,則除電效果越好。若靜電消除器偏重離子平衡時可用開口內縮設計的接地電極。
The electrostatic discharge (ESD) control is important for reliability of semiconductor electronic components. In industry, the main solution is to use ionizers for ESD control. Typically, an engineer refers to ionizer makers' data and works out the solution by try-and-error, lacking systemic evaluations, especially in parameter interactions. This research uses multi-objective programming (MOP) to develop an optimized model for AC ionizers and eliminate try-and-error approaches. Key experimental results obtained are material possessing for high breakdown voltage is a better choice for an emitter; the tip dimension of an emitter will collapse gradually and cause deterioration of neutralization capability;increasing the applied gas pressure may promote the neutralization capability but the ion balance may be poor; and if ion balance is desired for an ionizer , covering the grounding electrode of the ionizer can achieve the goal.
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