本論文主要是利用KrF準分子雷射對CVD鑽石膜作平坦化加工。有鑑於大部分文獻中，都偏向於實驗結果，因此在本文中建構了雷射燒蝕鑽石膜的加工機制，分為石墨化過程（graphitization process）及燒蝕過程（ablation process）兩個部分，建立其理論模型並以實驗加以驗證。
　　理論部分中，首先，推導出鑽石膜受到雷射照射後的溫度分佈模型，並由表面最高溫度判斷要達到加工現象的雷射臨界能量密度約為1.9 ，而經實驗後得到此值約為1.7 。接著，將臨界能量密度帶入移除率模型，預測出不同能量密度下的移除率。再來，提出適當模型來描述孵化效應的現象，利用實驗求出此實驗的鑽石膜其孵化係數約為0.0242，並得到雷射能量密度與達到燒蝕現象所需要的雷射發數之間的關係。最後，將鑽石膜受到雷射照射後的縱深溫度分佈帶入石墨化模型中，並求得殘留石墨化厚度，其值約在39～62 nm。
　　實驗部分則包括雷射平坦化實驗及奈米刮痕磨耗試驗兩項，其中在雷射平坦化實驗中還可分為定點照射及掃描照射兩項，由其實驗結果可得到移除率，其值與理論值相當吻合。另外，還可得到其表面粗糙度變化，在雷射能量密度較大時，雷射會破壞其表面的平整性，而在能量密度較小時，其粗糙度改善效果較好，且掃描照射的結果比起定點照射較適合做為表面粗糙度改善的方法。而在奈米刮痕磨耗試驗中，利用探針刮除加工後鑽石膜表面上的石墨結構，尤其表面形貌的變化來得到殘留石墨層厚度的實驗值，其值與理論值相當接近，藉此印證理論模型的正確性。

　　The polishing by KrF eximer laser for CVD diamond film is researched in the study. Most studies about this topic are the experimental results, so the mechanism of polishing which includes the two parts of graphitization and ablation process is established and confirmed by the experimental results in this study.
　　For the mechanism, the temperature distribution of the diamond film after beamed by laser is derived first, and the critical laser fluence of laser is predicted as 1.9J/cm2 theoretically (and the experimental result is 1.7 J/cm2) according to the highest temperature on the surface. Then, the removing rates under different laser fluence can be predicted after substituting the above critical value. Furthermore, substituting the incubation parameter of the diamond film (about 0.0242 obtained by experiments) into the incubation effect model, we can get the relation between the laser fluence and the number of laser pulses required to ablation. Finally, after substituting the temperature filed by laser beamed into the model of graphitization, the thickness of graphitization can be determined in the range of 39~62nm.
　　For the experiments, there are two parts of polishing and nanoscratch test. The polishing test includes the point and scanning beamed and the removing rates measured experimentally and predicted theoretically are quite close. The change in the surface roughness is observed. The greater laser fluence will damage the surface so the better roughness can be obtained in the case of small laser fluence; and the scanning beamed is more suitable for improvement of roughness. The scratch test is used to obtain the thickness of the residual graphite layer. The values of residual graphite layer thickness is close to those predicted theoretically and the good agreement in the residual graphite layer thickness confirmed the validity of the present model.

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