本文研究準分子雷射燒蝕後的微結構的預測模式的建立，以及提出其與實驗結果的比較。本文利用傅立葉光學推導雷射光經過光學導引系統之後，光的能量密度在空間中的局部分佈，再配合實驗所得的刻除率對能量密度的曲線，求出材料的局部燒蝕，進一步求得燒蝕後的結構。經由實驗驗證後可知，理論預測與實驗結果有良好的一致性。此模式也顯示出雷射光在偏離聚焦面之後，局部光通量的變化。此模式並且可準確預測出雷射正向或傾斜的入射材料(PI)燒蝕後的截面形狀。

Modeling and experimental work on the ablation of microstructures with excimer laser is presented. The local distribution of the light flux over the fabricated structure is calculated for each pulse by using Fourier optics. The variation of ablation depth with fluence (i.e., the curve of ablation rate) for polyimide is measured. The distribution of the light flux and the curve of ablation rate are then used to calculated the local ablation rate, and so the formation of the structure. The laser beam may be normal or oblique to the surface of polyimide. Predictions are in good agreement with the experimental results. Predictions by the model show that the defocus of the laser beam changes the local distribution of the light flux. The experimental results conform the predictions. The model correctly predicts the wall profiles of the structure for various incline and incident fluences.

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