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研究生: 張清河
Chang, Ching-Ho
論文名稱: 使用非導電膠之覆晶封裝數學模型建立
Development of a mathematical model for flip chip packaging process using NCA
指導教授: 楊文彬
Young, Wen-Bin
學位類別: 博士
Doctor
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2012
畢業學年度: 100
語文別: 英文
論文頁數: 110
中文關鍵詞: 覆晶封裝非導電膠殘留應力
外文關鍵詞: Flip chip packaging, Non-conductive adhesives, Residual stress
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  • 近年來越來越多的晶片封裝技術提出,其中覆晶封裝尤其受到重視。在液晶面板元件中,驅動晶片的封裝是一個很關鍵角色。在液晶面板大型化的趨勢下,驅動晶片的接角數量不斷上升。而在輕薄化的要求下,封裝的厚度也必須漸漸降低。目前在玻璃基板上的覆晶封裝技術主要採用異向性導電膠做為貼覆黏合材料。但異向性導電膠對於接點間距過小的晶片不適用。因此本研究對應用非導電膠的覆晶封裝技術就進一步探討。非導電膠的應用研究大多以實驗的方式進行,鮮少以理論方法建立數學模型。數學模型的建立對封裝樣品產出前的性質及可靠度預測皆有幫助。
    本文建立一個覆晶熱壓封裝過程的數學模型並與與實驗結果對比。此數學模型具有預測封裝間隙、錫球殘留應力以及錫球變形的能力。
    此數學模型與實際實驗數據比較中,第一種樣品晶片的熱壓過程過於快速,所以僅能比較最終的封裝高度。實驗和模擬的誤差約在8%以內。第二種晶片在熱壓過程中封裝高度的動態變化和模擬的趨勢一致,但實驗的結果較快達到最終穩定狀態。對於此現象推論是由於膠材性質的經驗公式對硬化過程中的黏度預測失準造成。
    藉由分析此模型的輸入參數可以發現大部分的覆晶熱壓封裝中膠體的流動可以視為平板流,錫球造成的阻力可以忽略不計。而非導電膠在某些狀況下有可能在熱壓頭下降過程中便硬化,導致膠體內應力產生。
    最後以本文提出的數學模型搭配有限元素軟體展示完整的分析流程,根據數值模擬結果發現封裝過程中的熱壓溫度降低可以有效減少最終封裝構體的最大翹曲。至於熱壓頭下壓力則須視設計需求而定,因為增加下壓力時,雖然錫球與基板接合點的接觸面積增加,但同時也會讓最後錫球內部殘留的壓應力減少。減少接觸電阻的同時也會讓封裝的可靠度下降。

    In this decade, many new techniques have been introduced into the integrated circuit (IC) packaging industry. Packaging technology used in liquid crystal displays (LCDs) has requirements related to critical issues such as high density interconnects, thinner packaging size, and environmental safety. Driver IC chips are directly attached to LCD panels using flip chip technology with adhesives in the so called chip on glass (COG) packaging processes.
    To investigate the dependence of the bonding force and bonding temperature on the flip chip thermal-compression packaging, this study established a mathematical model to analyze the flip chip packaging processes with non-conductive adhesives (NCAs). The plastic deformation of bumps and NCA flow between chip and substrate were taken into account in this model. The gap height and bump deformation after bonding can be estimated with this model.
    Experimental work was carried out to compare with the mathematical model for the thermal-compression bonding of flip chip packaging using NCA. The calculated and experimental final gap heights of Chip A did not match perfectly. The mismatch of the final gap heights between the calculated and experimental results shows that the solder bumps on Chip A are tougher than the prediction which may result from the difference in solder material proprieties.
    In order to observe the dynamic of the thermal-compression bonding process, Chip B was particular-designed. The experimental and calculated gap heights with respect to the elapsed time showed that the gap height reduced faster in experiment than calculated. The poor estimate of viscosity in the high temperature may be the major cause for this phenomenon. For residual stress prediction, this model gave the distribution of the bonding force applied on NCA and bumps. The calculated result of this model implies in some cases the NCA may gel before the end of bonding process. With the information provided by this model, the residual stress can be further simulated by a procedure considering complete three stages of simulation.
    According to the whole simulation in this work, the best tactic for the flip chip packaging process using NCA is bonded at the lower temperature. This reduces maximum warpage and only slightly decreases the average compressive residual stress in the bottom of bumps. As talking to magnitude of the bonding force, it depends on design demand. The bigger bonding force leads to the larger bump contact area with the substrate, but also leads to the smaller average compressive residual stress in the bottom of bumps. The bonding force during the flip chip thermal bonding process will affect the contact resistance and reliability of packaging at the same time.

    ABSTRACT IN CHINESE i ABSTRACT ix ACKNOWLEDGMENTS xi CONTENTS xii LIST OF TABLES xiv LIST OF FIGURES xv NOMENCLATURE xx CHAPTER Ⅰ INTRODUCTION 1 1.1 Introduction 1 1.2 Literature Review 5 1.3 Scope of Study 7 CHAPTER Ⅱ MATHEMATICAL MODEL 9 2.1 Assumptions 10 2.2 The Bonding Model 10 2.3 The Velocity Field 12 2.4 The Equation of Energy 14 2.5 The Curing Kinetics and Rheological Model 21 2.6 Calculation Procedures 24 CHAPTER III EXPERIMENTAL WORK AND MODEL VERIFICATION 27 3.1 Experimental Setup 27 3.2 Experimental Process 32 3.3 Experimental Data and Model Verification 33 CHAPTER Ⅳ PARAMETER ANALYSIS 41 4.1 The Consideration of Permeability 42 4.2 Material Properties and Chip Layout 45 4.3 Calculation Results and Discussion 48 CHAPTER Ⅴ POST BONDING STRESS ANALYSIS 55 5.1 Stage A (Compressing) 58 5.2 Stage B (Releasing) 62 5.3 Stage C (Cooling) 68 5.4 Effect of Bonding Temperature 78 CHAPTER VI CONCLUSIONS AND RECOMMENDATIONS 88 6.1 Mathematical Model 88 6.2 Experimental 88 6.3 Parameter Analysis 89 6.4 Post Bonding Stress Analysis 89 6.5 Suggestions for future work 90 REFERENCES 91 APPENDIX 95 1.1 Adhesive Material Properties 95 1.2 Compression Behavior of Bumps 103 PUBLICATION LIST 109 VITA 110

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