本研究使用準分子雷射微加工技術，在厚度為25μm的PVDF壓電薄膜上，來設計及製造感測直徑為0.7mm的微型壓力感測器。PVDF壓電薄膜具有高壓電應力係數、高響應頻率及高耐衝擊力等特性，極適合用於動態量測。而準分子雷射微細加工機則具有精密度高及高能量密度等特點，因此適合於本實驗中微感測器之加工。
為了得到所需之加工效果，本文先針對準分子雷射在雙面鍍鋁電極之PVDF薄膜進行加工測試，所考量的加工參數包含脈衝能量、脈衝數、加工頻率及距雷射光焦點間之距離。測試的結果顯示，組合適當的加工參數，可分別達到去除單面鋁電極、去除雙面鋁電極及去除整個PVDF材料等之加工效果。
為了提高加工效率，本研究以石英鍍鉻光罩進行雷射加工。而製成之感測器則以鉛筆心壓斷法進行動態之校正，最後並用於量測空蝕汽泡對鄰近物體表面所造成的脈衝壓力。結果顯示，以PVDF壓電薄膜所製成之感測器，非常適合用於強度高、作用時間短之壓力脈衝訊號。

An excimer laser micro-machining technique was used to fabricate a micro pressure sensor, 0.7 mm in diameter, on a 25-mm-thick piezoelectric polyvinylidene fluoride (PVDF) film. The PVDF film is known for its large piezoelectric stress coefficient, high frequency response, and the capability to sustain large impact pressure. These properties make it a good candidate for dynamic measurement. Meanwhile, the excimer laser micro-machining technique is characterized by its high precision and high working energy density and is particularly fit in our fabrication purpose.
For a better control of the machining results, a PVDF film coated on both faces with aluminum electrode was tested using the excimer laser. Various machining parameters, namely, the pulse energy, the number of laser pulses, pulse frequency, and the distance between the machining surface and the focus of the laser light were examined. Results showed that different degrees of material removal, including the removal of one side electrode, of the electrodes on both sides, and of the entire film material, could be attained by appropriate combination of these parameters.
In order to increase the efficiency of the laser machining, a chrome plated optical mask was employed to fabricate the sensor. The sensor was then dynamically calibrated using a pencil breaking method and was applied to measure the impulse pressure associated with the collapse of a cavitation bubble near a solid boundary. It is demonstrated that the PVDF piezoelectric sensor is very suitable for measuring the impulse pressure of high amplitude and short duration.

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