本論文建立一套石墨烯元件之製程，透過此法可於晶圓上製造複數分子級元件，進一步能製成積體電路。在本論文中完成了2-terminal元件，並用電子顯微鏡與光學顯微鏡及半導體分析儀分析其各項性質。

Miniaturization of electronic components has driven development in the semiconductor industry for the last 50 years. This scaling is becoming more and more challenging because we are starting to reach atomic dimensions. “Molecular electronics” is a new approach to address these issues by directly tailoring the atomic structure of components to impart certain electronic functionality through chemical means. This idea has afforded the vision of combining high performance, economic production, and ultra-high device density. Despite the potential, advances in this area have been limited because it is hard to produce molecular electronics circuits.
This thesis describes a method of fabrication that enables the parallel production of graphene-based vertical molecular scale devices, which is a necessary step towards circuit integration. Using a lithographical pre-patterned sample and angle evaporation we can produce structures without the need for lift-off steps that deteriorate the materails. With the vertical architecture and the use of self assembled molecular layers as channel material, molecular dimension ultra-short channel could be achieved. We demonstrate the fabrication of two terminal devices and study their properties by SEM, OM, and electrical transport measurements. These results suggest a convenient method for studying the properties of molecular devices since they are compatible with different channel materials. We also point out the limitations of the current device design.

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