本文將光流法及螺旋正交轉換應用於陰影疊紋法中，設計一套能動態量測的單拍陰影疊紋表面形貌量測系統，其架設是將傳統相位移法中的設置更改為兩組不同色的光源，利用彩色相機擷取兩組不同顏色的條紋圖，再利用光流法及螺旋正交轉換計算出相位差90度的條紋圖，進而計算條紋相位，經由相位展開法得到相位值，最後得到試件的表面形貌。本文分為模擬與實驗兩個部分，在模擬部分利用陰影疊紋法理論探討兩組疊紋圖的相位差與燈源位置的關係，進而訂定系統量測的最大高度限制並提出超過最大高度限制時的解決方案，當超過最大高度限制時條紋方向角會差180度，將超出位置條紋方向角補上180度則能解決該問題，再利用模擬多種表面形貌在三組不同光源入射角的光源組合的量測結果，藉此決定出最適合的光源入射角為45度，實驗部分則是比較兩種能減少不同光源的光強影響的影像處理方法，並與SMS粗度儀量測比較本系統的準確性，平均誤差為6.1μm，誤差標準差5.1μm。

In this paper, the optical flow method and spiral quadrature transformation are applied to the shadow moiré method. One shot shadow moiré surface profile measurement system capable of dynamic measurement is designed. This system is built on setup of traditional phase-shift system. Original light source is replaced by two polychromatic light sources. Capture two sets of fringe patterns of different colors by color camera, and then the fringe pattern with a phase difference of 90 degrees is calculated by optical flow method and spiral quadrature transform. Two 90 degrees pattern can calculate the fringe phase, and the phase vale can be obtained by the phase unwrapping method. Finally the unwrapping phase can calculate the surface profile of the specimen.
This paper is divided into two parts: simulation and experiment. In the simulation part, the relationship between the phase difference of the two sets of moiré patterns and the position of the light source is discussed by theory of shadow moiré method, and then the maximum height limit of the system measurement is set and a solution that exceeds the maximum height limit is proposed. When the maximum height limit is exceeded, the fringe orientation angle will different 180 degrees. So the position exceeded the limit adds 180 degrees can solve the problem. Then simulating multiple surface profile in three different sets of light source incident angles. The measurement result of the light source combination determines the most suitable light source incident angle is 45 degrees. The experimental part compares two image processing methods that can reduce the influence of light intensity of different light sources, and measures with the SMS roughness meter. Comparing the result of the system, the average error is 6.1 μm and the error standard deviation is 5.1 μm.

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