本論文利用嚴格耦合波分析法來進行結構有系統性的調整，除了針對金屬點大小、結構週期及金屬厚度做優化，還進一步利用模擬基板蝕刻的方式進行電場增益與分佈進行討論，發現基板透過蝕刻後會較大的電場增益及分佈區域增加的趨勢，並以此分析法優化後之結果做為後續製作金奈米圓盤陣列的參考。利用低成本且製程時間短之奈米轉印技術製及氧電漿蝕刻的方式在可撓性基板上製作出金奈米圓盤陣列，透過比較結構對於環境感測之靈敏度，最終選定進行後續非標籤分子偵測的結構為直徑200 nm週期400 nm與直徑250 nm週期500 nm的金奈米圓盤陣列，因為轉印後會有壓陷情況發生，故兩種結構皆有經過氧電漿蝕刻(50 W/20 sccm/160 s)。為了增加偵測膀胱癌之非標籤分子的穩定性，也有進行基板清洗方式的討論。
本研究針對轉印後之金奈米圓盤陣列，透過氧電漿蝕刻的方法，可使其品質因素(Figure-of-Merit)提升3~4倍且在10^(-5) g/mL 玻尿酸(hyaluronic acid)分子檢體偵測上有4.6 nm的訊號變化，對於研究在膀胱癌之非侵入式檢測系統中有很大的前瞻性。

Sensors designed based on the principle of local surface plasmon resonance have been widely used in non-labeled molecular detection and in local surface plasmon sensors, the periodic metal structure is more suitable for clinical testing .Therefore, this research proposes that the gold nano disk array (GNDA) is used as a sensor for bladder cancer non-label molecules, and the oxygen plasma etching parameters are adjusted to improve the Figure-of-Merit (FOM) value of the sensor. Finally, the FOM value can be increased by 3 to 4 times. In the detection of bladder cancer non-label molecule concentration of 10^(-5) g/mL, a signal displacement of 4.6 nm was obtained.

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