虛擬量測技術使用生產機台之製程資料與量測機台之量測資料來產生預測模型並預測產品品質，即在無實際量測之情況下監控製程品質。本論文設計一套能半自動建置虛擬量測模型之建模伺服器，虛擬量測建模伺服器係用於建置某類型之製程裝置(機台)的首套虛擬量測模型，此組虛擬量測模型包含：DQIX (Process Data Quality Index；製程資料品質指標)模型、DQIy (Metrology Data Quality Index；量測資料品質指標)模型、虛擬量測推估模型、RI (Reliance Index；信心指標)模型、GSI (Global Similarity Index；整體相似度指標)模型。為了讓建模程序能夠標準化以及讓使用者以更方便快速之方式建置新的虛擬量測模型，本論文提出的虛擬量測建模伺服器能自動向AVM伺服器取得所需的製程與量測資料，並透過模組建置程序完成首套的虛擬量測模型，最後虛擬量測建模伺服器自動將此類型製程裝置的首套虛擬量測模型上傳至VMM伺服器以進行虛擬量測模型移植與自動換模(Refresh)的步驟。

Virtual metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process tool and without physical metrology operation. This research proposes a model-creation (MC) server for VM systems to semi-automatically construct the first set of VM models (of a certain equipment type), including a DQIX (Process Data Quality Index) model, a DQIy (Metrology Data Quality Index) model, a VM conjecture model, a RI (Reliance Index) model, and a GSI (Global Similarity Index) model. In order to standardize the model-creation procedure and provide the users a more convenient method to construct the first set of VM models, the proposed MC server can handle complex intelligent algorithms during its process procedures. The proposed MC server can get information about the process and metrology state from a specific AVM server and create the first set of VM models by the model-creation procedure. Moreover, the proposed MC server can also upload the first set of VM models to the VMM (Virtual Metrology Management) server automatically, which can fan out the first set of VM models to other AVM (Automatic Virtual Metrology) servers of the same process apparatus (equipment) type. As a result, each individual fan-out-acceptor’s AVM server can perform automatic model refreshing processes so as to gain and maintain the accuracy of its VM models.

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