本研究探討700×700μm方形光罩與700×500μm矩形光罩及光圈大小在二極體藍光雷射(波長447nm)下，對基材進行光罩方向性投影微鑽孔加工之孔形形貌變化。
模擬部分，利用傅立葉繞射理論經MATLAB數值分析，模擬雷射加工之光束輪廓形貌；另使用FLUENT軟體之VOF方法計算雷射加工基材時，熔池之流體變化情形。
實驗部分，由偏光鏡測得雷射為線偏極性，利用雷射偏極性進行光罩方向性之光束輪廓探討，當方形光罩角度從0°轉為45°時，感測器接受到橢圓光束長軸透過光罩範圍變廣，在長軸x方向之光束輪廓從上下跳動轉為不規則起伏現象且隨功率有增加趨勢、在矩形光罩角度從0°轉為90°時，感測器接受到光束長軸透過光罩範圍變窄，在x方向光束輪廓孔徑則由M字形轉變為高斯現象且功率有減少趨勢。在透鏡組鑽孔實驗，使用方形光罩、矩形光罩下所得孔形為橢圓形；矩形光罩轉90°下所得孔形為圓形；在固定光罩下隨著光圈大小增加，孔形形貌之孔寬、孔深有增加的趨勢。

The aim of this study is to analyze the hole-shaping in diode laser (447nm) drilling with the projection method, and the effects of the mask with 700×700μm and 700×500μm at various orientations and square aperture sizes.

In the numerical analysis, the MATLAB computation program based on the Fourier diffraction theory was developed to analyze the intensity profile on the image plane at various optical parameters. Another approach of the flow field of melting pool on the substrate was simulated by the VOF method of FLUENT with laser heating.

In the experiment, the line polarization of the diode laser was verified by the polarizer, and then the beam profiles were measured with mask orientation from 0° to 90°. The results show that the beam profiles and the power were affected by the mask orientation. In the drilling experiment with the lens system, it can be found that the diffraction distortion at the beam profiles on the image plane and hole-shaping was significantly affected by the aperture size and mask orientation.

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