類鑽碳材料的光譜研究，隨著量測條件與數據處理方法的差異，會得到不同的光譜分析結果，造成學者常以自由心證的方式解釋，導致相關研究的理論與結果解讀呈現混亂狀態。
本研究分析與回顧一些已發表的期刊文獻，找出可能影響類鑽碳成份光譜分析的因素與疑點以供參考，如其他成份(主要為氫成份)、表面粗糙度、基材與多峰曲線擬合法等，皆可能會造成影響與偏差。
本研究使用濺鍍製備不含氫的非晶質碳膜，以濺鍍時間、濺鍍壓力與碳膜底下的金屬層種類為變因，探討數據處理對於相同雷射聚焦條件下連續量測之532 nm可見光拉曼光譜的影響，確認一般處理光譜數據常使用的多峰曲線擬合法與基線修正法，皆會造成光譜分析的結果更為混亂。本研究率先使用不經過多峰曲線擬合法的高度比值法(扣除基線)與積分面積法分析相同量測條件的可見光拉曼光譜，得到的結果較有一致性。
本研究使用積分面積法處理三個不同樣本之連續量測(n=3)原始拉曼光譜的最大標準差為0.040，遠小於使用兩峰、三峰或四峰高斯曲線擬合的標準差(分別為1.460、0.912與1.205)，可降低數據處理對光譜分析結果的影響，作為光譜分析數據處理的較佳方法參考。

Spectral correlation results for diamond-like carbon materials are changed by the measuring conditions applied and the data analysis methods used. Present researchers, by using different methods and not justifying the basis of their analytic approaches, have introduced serious disorder into the theory and conclusions presented in the literature representing diamond-like carbon research.
This study by analyzing and discussing published papers, revealed factors and questionable points which affect the diamond-like carbon spectral results: other elements (especially, hydrogen), the roughness of the surface, substrates, and the multi-curve fitting method all variously introduce influences and errors.
This study prepared sputtered amorphous carbon without hydrogen, using sputtering time, sputtering pressure, and the substrates supporting the carbon films as variable factors to discuss the effect of the data analytic method for the 532 nm visible Raman spectra which were measured several times, under constant conditions. The multi-curve fitting method and the baseline correction method are both commonly usually used and make the spectral results more disorderly. This study employs for the first time the use of peak height ratios HD/HG (dependent on the distance from the peak to the baseline) and analysis by direct area integration (AD/AG ratios) – techniques both of which omit the requirement for multi-curve fitting, and lead to more regular results.
In this study, the largest standard deviation was 0.040, measured using multiple determinations with three separate samples (n=3); with the area integration methods being applied to the original Raman spectra under constant conditions. The deviations determined were lower than standard deviations determined by using two-Gaussian, three-Gaussian, or four-Gaussian curve fitting methods, which were 1.460, 0.912, and 1.205 respectively. Using the area integration method we were able to reduce the influence of the data analytic method when applied to the spectral results and as such apply it as a better reference method for spectral analysis.

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