本實驗利用單一複合靶材的直流磁控濺鍍系統來製作FePt奈米磁顆粒嵌在非晶質碳基底的複合磁性膜。我們設計了三種不同的退火模式，主要探討這三種退火模式對樣品的微觀結構及磁性質的影響。此三種退火模式分別為常規熱退火(regular thermal annealing)，快速熱退火(rapid thermal annealing)，二階段熱退火(two-stage thermal annealing)。藉由快速與二階段退火的薄膜，其磁顆粒大小皆比常規熱退火的顆粒小。而二階段退火的顆粒會比快速退火稍大，但其平均粒徑仍低於10nm。二階段退火在ta =10min的條件下有最大的室溫頑磁場(2520 Oe)，其平均磁顆粒大小約為6nm。二階段退火在ta =2min時的樣品，磁顆粒間有微小的靜磁交互作用(δM的峰值為-0.11)。

　　In this work, composite magnetic films of FePt nanograins embedded in an amorphous carbon matrix were fabricated by dc magnetron sputtering system of a single composite target. We designed three different annealing modes to study the influence of different annealing processes on the microstructure and the magnetic properties of samples. The three annealing modes are regular thermal annealing (RGT), rapid thermal annealing (RPT) and two-stage thermal annealing (TST). The grain size of films obtained from both RPT and TST are smaller than that of RGT with the one of TST is slightly larger. However the grain size of TST is still below 10nm. The largest room-temperature coercivity (2520 Oe) is obtained for the mean grain size of about 6nm in TST with ta=10min. The sample of TST with ta=2min shows small magnetostatic interaction (δM peaked at -0.11) between the magnetic grains.

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