本實驗利用中頻雙極磁控濺渡系統與非平衡磁控濺渡系統混合的方式，於底材上被覆氮化鈦/氮化鋁多層膜。其主要目的為探討氮化鈦/氮化鋁多層膜的磨耗性質、抗氧化能力以及形成超晶格結構的濺鍍參數。
實驗分為兩階段，第一階段是探討氮氣流量變化對鍍膜的機械性質與元素含量的影響。第二階段則是以試片旋轉器的轉速為變化參數，主要目的是欲藉由增加旋轉器的轉速，讓氮化鈦/氮化鋁多層膜的週期值小至3nm以下，而形成超晶格結構的氮化鈦/氮化鋁多層膜。經由各項實驗與分析方法來探討形成超晶格結構的氮化鈦/氮化鋁多層膜在磨耗性質、機械性質與氧化性能上的表現。
第一階段鍍膜實驗得知，當鍍膜中的氮含量增加時，鍍膜的硬度值也會增加，其附著性也較佳。經磨耗實驗也證實氮氣流量為20sccm的試件，有較高的抗磨耗性。
第二階段鍍膜經X光繞射分析得知，當試片旋轉器的轉速為4rpm、5rpm時，氮化鈦/氮化鋁多層膜可形成超晶格結構。經磨耗實驗得知，超晶格結構的氮化鈦/氮化鋁多層膜其抗磨耗性能會優於非超晶格結構的氮化鈦/氮化鋁多層膜；超晶格結構的氮化鈦/氮化鋁多層膜的抗氧化能力是氮化鈦鍍膜的16倍；在車削與鑽削實驗方面，被覆具超晶格結構的氮化鈦/氮化鋁多層膜的車刀與微鑽針，其刀具壽命也遠高於其他條件的車刀與微鑽針。由此可證實，於高溫的狀態下，超晶格結構的氮化鈦/氮化鋁多層膜的確有助於提升車刀與微鑽針的壽命。

The main purpose of this study is to research the tribological properties、oxidation ability and the sputtering parameters to be a super-lattice structure of the TiN/AlN multilayers . The TiN/AlN multilayers prepared by a mixed sputtering system(medium frequency twin magnetron sputtering system and unbalanced magnetron sputtering system).
The study has two stages : the first stage, to change the nitrogen flow rate, and to probe into the influence of mechanical properties and element component of the TiN/AlN multilayers ; the second stage , to change the rotational speed of the holder , the purpose is makes the period of the TiN/AlN multilayers less than 3nm , and to be formed a super-lattice TiN/AlN multilayers.
The research of the first stage , we know that the hardness of the TiN/AlN multilayers increase with the nitrogen content , as well as the adhesion of the TiN/AlN multilayers . after the wear test , we found the best wear resistance of the TiN/AlN multilayers is the specimen N20(nitrogen flow rate is 20 sccm).
By the XRD analysis , we know that the TiN/AlN multilayers can be formed super-lattice structure that rotational speed of the holder is 4rpm and 5rpm. Through the wear test , wear resistance of the super-lattice TiN/AlN multilayers is more excellent than others non-superlattice TiN/AlN multilayers . In the oxidation test, the super-lattice TiN/AlN multilayers(specimen R4) improved oxidation resistance ability 16 times more than TiN coatings . In the turning and drilling tests , the tool life of coating a super-lattice TiN/AlN multilayers on cutting tools are more longer than others conditional tools. To confirm from above tests , in high temperature status , the super-lattice TiN/AlN multilayers really be able to improve the tool life.

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