光電效應是液晶最重要的特性，可是將液晶注入單純的玻璃基板，外加電場後無法看到有效的光調制現象。因此需要配向層導引液晶分子使之均勻而整齊劃一，產生有效率的調制光。配向層經過配向處理使表面的液晶分子導軸可以穩定而整齊劃一的並排於同一方向(easy axis)，進而影響Bulk 層液晶分子的運動，使得整體液晶在外加電場調控下成為優質的平面顯示器，決定配向層功能有兩個關鍵性因素；錨訂力和預傾角。
　　本論文有兩個主題；首先是研發無機配向膜，將二氧化矽(SiO2)材料濺鍍於ITO玻璃基板上，經過離子束撞擊(ion-beam treatment)，將原來平整的二氧化矽膜表面蝕刻出具有方向性且凹凸有秩的微溝槽(microgrooves)與奈米顆粒(nano-grain)，降低配向層表面自由能，增加基板和液晶分子間的作用力，使用無機材料作為配向膜用在LCoS液晶面板亦能產生配向效果。將來希望藉由調整離子束撞擊(ion-beam treatment)方位角及撞擊能量，有效控制錨釘力大小和預傾角角度，使LCoS液晶面板顯示器品質長期穩定，不受有機配向膜短時間鍵结斷裂而造成畫質劣化的威脅。
　　其次為錨釘力和預傾角的量測，架設反射式橢圓儀量測由奇景公司提供的LCoS液晶面板，量測光電效應下液晶面板的phase retardation變化，我們使用光彈調制器（photo-elastic modulator PEM-90）使反射式橢圓儀靈敏度提高到可以測量細微phase retardation變化，並於待測樣品上放置折射率1.82的梯形菱鏡(dove prism)，使入射光只要到達配向層表面，抓取因外加高電壓脈衝觸發脫錨現象而造成的細微phase retardation變化。此phase retardation變化經演算出轉動角變化度，即為預傾角大小，外加高電壓脈衝能量足以將配向層表面液晶分子瞬間推離easy-axis，將此外加高電壓脈衝總能量累加即是錨訂力的大小。目前預傾角的量測主要以Crystal rotation method 為主，具備極高的精確度，但是對VA 液晶cell gap小於10μm則無法量測，量測錨釘力，學理上有S.H.G.及High Electric Field等方法，但重複性不高且結果相距100〜1000倍，因此錨釘力量測技術仍有發展的空間。

　　Understanding the behavior of liquid crystal (LC) molecules at the interface between LC and an alignment film is not only of physical interest but also of technological importance for display devices. The conventional LC alignment method, a polymer film printing followed by rubbing, has several drawbacks; for example rubbing tracks and printing nonuniformity of polymer film. These problems become especially noticeable in liquid crystal on silicon (LCoS). Moreover, the organic alignment layer has serious issues of reliability in which the polymer chains degrade by ultraviolet (UV) rays in LCoS panel. For these reasons, a robust non-contact alignment and easily controlled film formation methods are required for LCoS panels. Here we describe such a combination : SiO2 as alignment film and ion beam (IB) bombardment as the alignment method. By this combination of generally evaporated SiOx and IB treatment to generate a tilted homeotropic alignment, we were the first group to use this alignment technique in LCoS light valves for projection displays. In this paper, we design a new total reflection ellipsometer, which is proposed to investigate the behavior of the LC molecules at the interface LC and an alignment film. This ellipsometric method allows us to observe the reflected light, which contains the information, such as the anchoring energy and pretilt angle, on the LC molecular behavior at the front interface between LC and alignment film. The anchoring energy and pretilt angle for an alignment film of VA mode polyimide are 2.5×10-3J/m2 and 86.70, respectively. These measurement results consist with that of transmissive measurement method.

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