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研究生： 黃群耀
Huang, Chun-Yao
論文名稱： 鋁含量對鎢-鋁鍍層的氧化機構及機械性質之影響
Effects of aluminum content on oxidation mechanism and mechanical properties of W-Al coatings
指導教授： 蘇演良
Su, Yen-Liang
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2014
畢業學年度： 102
語文別： 中文
論文頁數： 103
中文關鍵詞： PVD 、鎢 、鋁 、氧化機構
外文關鍵詞： PVD, Tungsten, Aluminum, oxidation
相關次數： 點閱：90  下載：2 
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    • 本研究採用非平衡磁控濺鍍法，在高速鋼和矽晶片底材鍍上一層鎢鋁薄膜，探討鍍層於氧化處理前後的結構變化，並分析其氧化機構。實驗依製備方式不同分為兩階段，第一階段為控制鋁靶電流，製備一系列不同鋁含量比例之鎢鋁鍍層，探討鋁含量的增加對鍍層的影響；第二階段則是將鎢靶電流降低，探討在相近的鋁含量下，降低鎢靶電流對鍍層的影響。實驗結果得知，第一階段鍍層氧化處理前硬度隨著鋁含量的提升而下降。經氧化後，氧化鋁和氧化鎢會隨鋁含量變化而改變，鋁含量大於45 at.%以上之鍍層的氧化層幾乎完全是氧化鋁，氧化鋁阻止了氧原子侵入鍍層，使鍍層得到保護。鋁含量0~30 at.%鍍層在氧化處理後因氧化鎢的含量較多，使得未經氧化塗層的硬度比經氧化後鍍層為高。鋁含量大於45 at.%的鎢鋁鍍層，因氧化鋁的含量較多，使得經氧化鍍層的硬度比未經氧化鍍層為高；第二階段鍍層經熱處理後奈米硬度皆大幅提升，且Ⅱ-W-55Al在600℃熱處理後硬度甚至可達15GPa，並維持良好的附著性。

    Kinds of aluminum added different elements are used in aerospace, military and semiconductor industries, because of its well conductivity, thermal stability and easy forming. In this study, W-Al multilayer coatings (1~1.5um) are deposited on HSS and Si wafer with different component of Aluminum (0,15,30,45,65 at %) by Unbalanced Magnetron Sputtering system. During the coating process Cr (0.1um) and Cr-Al (0.2um) were deposited as the interlayer. Multilayer coatings were been oxidation treatment and investigated the structural changes and the oxidation mechanism. Experimental results show that, the hardness of as-deposited coatings increase with the decreasing of aluminum content. After oxidation treatment , 0~30 at % component of Al coatings have more content of tungsten oxide and the hardness declined. However, Al content more than 45% of the oxide coating layer is almost entirely alumina, which prevents the invasion of oxygen and been as the coating protection.

    摘要 I Abstract II 誌謝 IX 總目錄 X 表目錄 XII 圖目錄 XIII 第一章 緒論 1 1-1 前言 1 第二章 理論探討與文獻回顧 2 2-1 磁控濺鍍原理 2 2-2 奈米多層膜 5 2-3 切削刀具鍍膜 6 2-4 鎢與氧化鎢的性質 7 2-5 鋁與氧化鋁的性質 8 第三章 實驗方法與步驟 9 3-1 實驗目的 9 3-2 實驗流程 9 3-3 實驗方法與規劃 12 3-3-1 鍍層參數與鍍膜安排 12 3-3-2 底材材料 15 3-3-3 結構分析 15 3-3-4 成份分析 16 3-3-5 硬度實驗 17 3-3-6 附著性實驗 18 3-3-7 氧化實驗 18 3-4 實驗設備清單 19 第四章 實驗結果與討論 21 4-1 增加鋁靶電流對W-Al系列鍍層之影響(第一階段鍍層) 21 4-1-1 成分分析 21 4-1-2 結構分析 25 4-1-3 鍍膜表面及斷面SEM觀察 26 4-1-4 鍍膜斷面TEM觀察 28 4-1-5 奈米硬度及彈性模數 32 4-1-6 附著性 32 4-2 熱處理對第一階段鍍層之影響 34 4-2-1 結構分析 34 4-2-1-1 500℃熱處理 34 4-2-1-2 600℃熱處理 36 4-2-2 熱處理後鍍膜表面及斷面SEM觀察 38 4-2-2-1 500℃熱處理 38 4-2-2-2 600℃熱處理 40 4-2-3 熱處理後成份分析 42 4-2-4 氧化層厚度分析 49 4-2-5 奈米硬度及彈性模數 50 4-2-6 附著性 51 4-2-7 小結 54 4-3 降低鎢靶電流對鍍層之影響(第二階段鍍層) 55 4-3-1 成分分析 55 4-3-2 結構分析 57 4-3-3 鍍膜表面及斷面SEM觀察 57 4-3-4 鍍膜斷面TEM觀察 58 4-3-5 奈米硬度及彈性模數 59 4-3-6 附著性 60 4-4 熱處理對第二階段鍍層之影響 61 4-4-1 結構分析 61 4-4-1-1 500℃熱處理 61 4-4-1-2 600℃熱處理 61 4-4-2 熱處理後鍍膜表面及斷面SEM觀察 64 4-4-2-1 500℃熱處理 64 4-4-2-2 600℃熱處理 65 4-4-3 熱處理後成份分析 66 4-4-4 氧化層厚度分析 68 4-4-5 奈米硬度及彈性模數 68 4-4-6 附著性 70 4-4-7 小結 71 第五章 結論 72 第六章 參考文獻 74 附錄一、W-45Al經500℃熱處理後之氧化層 77 附錄二、GDS成份分析原圖 78 附錄三、奈米硬度 Load-Displacement圖 90 附錄四、聯絡人 102

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