矽探測器發展至今已經有20 年的歷史，主要用於探測軌跡辨識位置來回推粒子的動
量大小以及行進方向，美國布魯克海文國家實驗室(Brookhaven National Laboratory)
的相對論性重離子對撞(Relativistic Heavy Ion Collider) 中的STAR 更新了前進方向的
矽探測器，探測器主要由單層雙金屬的矽長條的探測器組成，由AC 耦合作為讀出
訊號。 在本篇論文中，我們根據FST 矽探測器所給出來的規格，自行設計以及製作，
再經由電性上的量測找出最適合製作此探測器的製程參數。

Silicon detectors have been used in high energy physics experiments for more than 20 years. The application of this type of detector technology is mainly for tracking, i.e. to measure the momentum and directions of charged particles. A single-sided, double metal, and AC coupled readout silicon strip sensor has been developed for Forward Silicon Tracker (FST), the new forward detector in the STAR experiment. This thesis is to demonstrate the design, the process flows according to the FST silicon sensor specifications, as well as the tests for quality assurance by measuring the electrical signals.

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